Lam Research 716-037794-003 C Ring INSLTR FACIL CL FLEX 45 *new surplusLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 9-1/2"ID ESC Chuck Wafer Focus/Guard RingLam Research 716-037794-003 Rev. C Ring Semiconductor PartLam Research 716-037794-003 Rev. 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LAM RESEARCH 716-037794-003

ESC Chuck Focus/Guard Ring

Market Availability & Pricing

Part number716-037794-003
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Ceramic & Quartz Parts
ESC Chuck Focus/Guard Ring
LAM RESEARCH716-037794-003Focus/guard ring
Product description
9-1/2 inch ID ESC chuck wafer focus/guard ring; C ring insulator wording also appears
Specifications and identifiers
observed
Description9-1/2 inch ID ESC chuck wafer focus/guard ring; C ring insulator wording also appears
Supported by provided listing title evidence.
Feature/context9-1/2 inch ID, ESC chuck context
Dimension/context appears in evidence; verify against drawing.
ESC contextESC chuck wafer ring
Evidence places the ring around ESC chuck/wafer hardware.
Equipment context
  • Lam Research ESC chuck/chamber hardware
Applications
ESC chuck ring hardwareWafer edge/focus/guard/shadow functionsLam Research chamber consumablesESC chuck ring replacementWafer edge/process-area chamber hardware
How it works

An ESC chuck wafer ring is a process-area ring used around an electrostatic chuck to manage wafer edge, focus, guarding, shadowing, or insulation functions.

These parts are fit- and material-sensitive; small ID, material, coating, or revision differences can affect process results and hardware clearance.

Technical guide
ESC

Electrostatic chuck; holds the wafer during processing.

ID
Inside diameter.
What to verify before purchase
  • Confirm ID/OD, thickness, material, coating, and revision.
  • Inspect for chips, cracks, erosion, or contamination.
  • Verify exact Lam chamber/tool compatibility.
Confirm with the seller
  • Exact tool/chamber model
  • Full dimensional drawing
  • Coating/surface treatment

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research 716-037794-003 C Ring INSLTR FACIL CL FLEX 45 *new surplus

Lam Research 716-037794-003 C Ring INSLTR FACIL CL FLEX 45 *new surplus

USD 2000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 9, 2022 21:30 UTC
End recorded: Dec 7, 2024 14:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

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