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LAM RESEARCH 716-053569-020

Quartz coupling ring

Market Availability & Pricing

Part number716-053569-020
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Ceramic & Quartz Parts
Quartz coupling ring
LAM RESEARCH716-053569-020Quartz coupling ring
Product description
Lam Research quartz coupling ring; listing evidence is limited but consistently ring/quartz/chamber-part oriented.
Specifications and identifiers
evidence
Listing identityQuartz coupling ring
Source title identifies the item as a Lam Research ring/chamber component.
Applications
etch chamberswafer edge/process kitsLam chamber ring/process-kit component
How it works

A shaped chamber part, often quartz or ceramic, used near the wafer or plasma region.

Rings affect plasma confinement, wafer edge conditions, and contamination control.

Technical guide
QTZ
quartz
What to verify before purchase
  • Confirm material, dimensions, revision, and exact chamber position.
Confirm with the seller
  • Exact tool compatibility beyond the listing context is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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