Lam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part UnitLam Research 716-116522-006 300mm H/E Hot Edge Ring Semiconductor Part Unit
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LAM RESEARCH 716-116522-006

300mm Hot Edge Ring

Market Availability & Pricing

Part number716-116522-006
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Process Rings
300mm Hot Edge Ring
LAM RESEARCH716-116522-006Hot edge ring
Product description
Lam Research 300mm H/E hot edge ring semiconductor part.
Specifications and identifiers
identification
Evidence-backed item phrase300mm Hot Edge Ring
Normalized from repeated listing titles.
ManufacturerLAM RESEARCH
Manufacturer/OEM as provided in request.
Part number716-116522-006
Part number from request.
observed ratings or dimensions
Observed title terms300MM
Unverified listing-title terms; verify against label/drawing.
Equipment context
  • Specific platform not confirmed
Applications
process chamber consumable or structural hardware replacementmatching chamber geometry/material for maintenance
How it works

A 300 mm edge ring associated with heated/hot-edge chamber hardware.

Edge rings shape plasma/process conditions around wafer edges and are high-wear process parts.

What to verify before purchase
  • exact revision/suffix and assembly configuration
  • physical condition, missing hardware, and contamination/cleanliness
  • material/coating, wafer size, chamber model, and dimensional match
Confirm with the seller
  • full OEM datasheet specifications
  • guaranteed tool compatibility beyond listing-title evidence

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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