716-140118-001 / FOCUS RING, ESC, 8 / LAM RESEARCHLAM RESEARCH 716-140118-001 RING, FOC, ESC. 8", NEW15397 LAM RESEARCH FOCUS RING ESC 8" 716-140118-001716-140118-001 FOCUS RING CERAMIC 4528716-140118-001 / FOCUS RING, ESC, 8 / LAM RESEARCH716-140118-001 / FOCUS RING, ESC, 8 / LAM RESEARCH716-140118-001 / FOCUS RING, ESC, 8 / LAM RESEARCHLam Research 716-140118-001 Focus Ring ESC 8" UsedLam Research Confinement Ring 716-140118-001Lam Research 716-140118-001 Focus Ring 4528 Etcher RefurbishedLam Research 716-140118-001 Focus Ring ESC 8" Used WorkingLAM 716-140118-001 Focus Ring 4528 Oxide Etch
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LAM RESEARCH 716-140118-001

Focus Ring, ESC, 8"

Market Availability & Pricing

Part number716-140118-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Rings & Shields
Focus Ring, ESC, 8"
LAM RESEARCH716-140118-001Focus ring
Product description
Focus ring for Lam Research ESC/etch chamber use, identified as an 8 inch ESC focus ring and 4528 etcher focus ring.
Specifications and identifiers
identified attributes
FunctionESC focus ring
Size/context8 inch
Process/chamber context4528 oxide etch / ESC context
Equipment context
  • Lam 4528 etcher
  • Lam 4528 oxide etch
Applications
Process chamber kitsPVD/CVD/etch chamber maintenanceWafer-edge or pedestal-area hardwarePlasma etch chamber focus-ring serviceWafer edge plasma confinement around an electrostatic chuck
How it works

A chamber or wafer-area mechanical component used near the wafer, pedestal, or plasma/process region.

Geometry, material, surface condition, and revision can affect process uniformity, particle generation, and chamber fit.

Technical guide
ESC
Electrostatic chuck; a wafer-holding chuck that uses electrostatic force.
What to verify before purchase
  • Confirm exact material, revision, and chamber configuration before installation.
  • Inspect ring condition, erosion, chips, and clean/contamination state.
Confirm with the seller
  • Exact ceramic material is not confirmed.
  • Direct chamber compatibility beyond 4528/ESC context is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

716-140118-001 / FOCUS RING, ESC, 8 / LAM RESEARCH

716-140118-001 / FOCUS RING, ESC, 8 / LAM RESEARCH

USD 2005.6700

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 1, 2026 21:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH 716-140118-001 RING, FOC, ESC. 8", NEW

LAM RESEARCH 716-140118-001 RING, FOC, ESC. 8", NEW

USD 2700.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: NEW
Listed: Jan 12, 2021 05:29 UTC
End recorded: Dec 7, 2024 19:14 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:34 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
15397 LAM RESEARCH FOCUS RING ESC 8" 716-140118-001

15397 LAM RESEARCH FOCUS RING ESC 8" 716-140118-001

USD 796.5500

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Dec 4, 2019 01:29 UTC
End recorded: Dec 7, 2024 08:39 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
716-140118-001 FOCUS RING CERAMIC 4528

716-140118-001 FOCUS RING CERAMIC 4528

USD 1380.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 29, 2019 14:02 UTC
End recorded: Dec 7, 2024 07:13 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:27 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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