LAM RESEARCH 716-140163-261  RING, HOT EDGE, STDLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLAM RESEARCH 716-140163-261  hot edge ringLam Research  6" 15 DEG HOT EDGE RING, 716-140163-261, VARITECH 2ND SOURCE, NEWLam Research 6" SILICON HOT EDGE RING, 716-140163-261 REV C, NOSLAM 716-140163-261
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LAM RESEARCH 716-140163-261

6-Inch Hot Edge Ring

Market Availability & Pricing

Part number716-140163-261
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales895 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Consumables › Edge Rings
6-Inch Hot Edge Ring
LAM RESEARCH716-140163-261hot edge ring
Product description
Lam Research 6-inch silicon hot edge ring / standard hot edge ring
Specifications and identifiers
supported identity
Item typeHot edge ring
Ring component positioned at the wafer edge region in a process chamber.
Size6 inch
Several entries identify 6-inch hot edge ring context.
Material mentionSilicon
Silicon is mentioned in one source; material should still be verified physically.
Equipment context
  • Lam Research plasma process chamber
Applications
plasma etch chambersedge protectionprocess kit consumablesReplacement hot edge ring for a Lam process chamberProcess kit maintenance around wafer edge region
How it works

An edge ring surrounds the wafer edge region and can influence plasma boundary conditions, edge uniformity, and chamber protection.

Correct material, profile, and revision matter for process repeatability and chamber fit.

Technical guide
silicon

Silicon is indicated in the evidence for at least one variant; confirm by part marking or OEM documentation.

What to verify before purchase
  • Confirm material, diameter, revision, edge profile, and whether it is OEM or second source
  • Verify chamber family compatibility
Confirm with the seller
  • Exact tool model and material for every revision are not fully confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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