Applied Ceramics Ring Confinement QTZ PN: 92-00297A Lam Research 716-140236-002Applied Ceramics Ring Confinement QTZ PN: 92-00297A Lam Research 716-140236-002APPLIED CERAMICS 92-00297A RING,CONFINEMENT,QTZ LAM RESEARCH 716-140236-002716-140236-002 CERAMIC CONFINEMENT RING MODULAR716-140236-002 / R, CONFINEMENT, MOD, QTZ DEGREASE / LAM RESEARCHLam Research Ring Confinement Quartz 716-140236-002 New / Sealed(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease RingLam Research Ring Confinement Quartz 716-140236-002 New / Sealed(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease Ring(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease Ring(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease Ring(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease Ring(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease Ring(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease Ring(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease Ring(NEW) LAM Research 716-140236-002 R, Confinement, Mod, QTZ Degrease Ring
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LAM RESEARCH 716-140236-002

Quartz Confinement Ring

Market Availability & Pricing

Part number716-140236-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales600 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Rings
Quartz Confinement Ring
LAM RESEARCH716-140236-002Quartz Confinement Ring
Product description
Ring, confinement, modular, quartz
Specifications and identifiers
identification
MaterialQuartz / QTZ
FunctionConfinement ring
Alternate referenceApplied Ceramics 92-00297A referenced
Applications
Process chambersWafer processing hardwareVacuum chamber servicePreventive maintenance kitsPlasma confinement hardwareLam chamber quartz ring replacement
How it works

A mechanical process-tool component used for shielding, spacing, sealing, mounting, confinement, or chamber geometry control.

Material, coating, dimensions, process position, and surface condition can affect plasma behavior, contamination risk, and mechanical fit.

Technical guide
CVD
Chemical vapor deposition.
ESC
Electrostatic chuck.
QTZ
Quartz.
SST
Stainless steel.
What to verify before purchase
  • Quartz condition and cleanliness
  • Exact revision and dimensions
  • Chamber compatibility
Confirm with the seller
  • Specific tool serial-number compatibility
  • Current calibration or functional test status

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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