AMAT 716-140236-062 RING,CONFINEMENT QUARTZ Applied MATERIALS AMAT 716-140236-062 RING,CONFINEMENT QUARTZ Applied MATERIALS AMAT 716-140236-062 RING,CONFINEMENT QUARTZ Applied MATERIALS AMAT 716-140236-062 RING,CONFINEMENT QUARTZ Applied MATERIALS AMAT 716-140236-062 RING,CONFINEMENT QUARTZ Applied MATERIALS AMAT 716-140236-062 RING,CONFINEMENT QUARTZ Applied MATERIALS AMAT 716-140236-062 RING,CONFINEMENT QUARTZ Applied MATERIALS
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APPLIED MATERIALS 716-140236-062

Quartz Confinement Ring

Market Availability & Pricing

Part number716-140236-062
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Ceramic & Quartz Parts
Quartz Confinement Ring
APPLIED MATERIALS716-140236-062Quartz confinement ring
Product description
Lam Research quartz confinement ring.
Specifications and identifiers
identification
ItemConfinement ring
Process-chamber ring used to define or confine plasma/gas flow region.
MaterialQuartz
Material stated in the item description.
Applications
CVD and HDP-CVD chambersetch process modulesCMP head and wafer support assembliesplasma chamber confinement ringquartz process ring replacement
How it works

A chamber consumable or process-facing component sits in or near the process environment and influences gas flow, plasma boundary conditions, shielding, or wafer support.

Material, coating, dimensions, and surface condition can affect particles, deposition/etch uniformity, and chamber matching.

Technical guide
CVD
Chemical vapor deposition.
HDP-CVD
High-density plasma chemical vapor deposition.
TEOS
Tetraethyl orthosilicate, a common silicon-oxide precursor.
What to verify before purchase
  • Verify dimensions, hole/notch pattern, and compatible Lam chamber.
  • Inspect quartz for chips, cracks, discoloration, or contamination.
Confirm with the seller
  • Exact Lam platform/chamber compatibility.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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