Product description
Lam Research 716-330504-081 8 inch focus ring / ESC guard ring, associated with 2300 context.
Specifications and identifiers
identification
| Description | Focus ring / ESC guard |
|---|
| Nominal size | 8 inch |
|---|
| Reported platform context | Lam 2300 appears in evidence |
|---|
Equipment context
- Lam Research 2300 chamber ESC/focus-ring stack
Applications
PVD/CVD/etch chamber kitswafer-area consumablesESC and focus-ring stacksESC guard/focus ring replacementEtch chamber consumable serviceWafer-edge plasma control
How it works
A shaped process-facing ring or chamber component used near a wafer, chuck, electrode, or gas path.
Geometry, material, coating, and cleanliness can affect plasma behavior, contamination risk, and fit.
Technical guide
aluminum
common lightweight chamber hardware material
ceramic
electrically insulating, process-compatible material used in chamber hardware
quartz
high-purity silica glass used in plasma or high-temperature environments
- ESC
- electrostatic chuck
What to verify before purchase
- Verify material, diameter, revision, and chamber compatibility
- Inspect for erosion, chips, and contamination
- Confirm if the item is small focus ring or full ESC guard ring for the installed stack
Confirm with the seller
- Exact material and chamber variant are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.