716-330915-001 / INSULATOR CERAMIC RING ESC 9600XX / LAM RESEARCHLAM RESEARCH (LAM) 716-330915-001 COORS CERAMICS CO.  INSUL, ESC 960015568 LAM RESEARCH RING,INSULATOR,CERAMIC (NEW) 716-330915-001716-330915-001 INSULATOR CERAMIC ESC 9600PTX716-330915-001 / INSULATOR CERAMIC RING ESC 9600XX / LAM RESEARCH716-330915-001 / INSUL, ESC 9600XX / LAMLam Research 716-330915-001 ESC Insulator Ring 9408 Etcher RefurbishedLam Research 716-330915-001 Ring Insulator Ceramic Manufacturer RefurbishedLAM Research 716-330915-001 Insulator ESC 9,600 XX R3-R4-4 *cleaned*Lam Research Model: 716-330915-001 Ceramic Insulator Ring.  New Old Stock   <JLAM 716-330915-001 ESC Insulator Ring 9408 Poly VAT 65
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LAM RESEARCH 716-330915-001

Lam ESC Ceramic Insulator Ring

Market Availability & Pricing

Part number716-330915-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales600.56 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
Lam ESC Ceramic Insulator Ring
LAM RESEARCH716-330915-001Ceramic ESC insulator ring
Product description
Lam Research 716-330915-001 ceramic insulator ring for ESC use, associated with 9600 / 9408 etcher context.
Specifications and identifiers
identification
DescriptionCeramic ESC insulator ring
Reported contextLam 9600 / 9408 etcher appears in evidence
Supplier/material noteCoors Ceramics appears in evidence
Equipment context
  • Lam 9600 / 9408 etcher ESC assembly
Applications
PVD/CVD/etch chamber kitswafer-area consumablesESC and focus-ring stacksESC insulationEtch chamber ceramic ring replacementProcess-facing insulator service
How it works

A shaped process-facing ring or chamber component used near a wafer, chuck, electrode, or gas path.

Geometry, material, coating, and cleanliness can affect plasma behavior, contamination risk, and fit.

Technical guide
aluminum

common lightweight chamber hardware material

ceramic

electrically insulating, process-compatible material used in chamber hardware

quartz

high-purity silica glass used in plasma or high-temperature environments

ESC
electrostatic chuck
What to verify before purchase
  • Verify exact geometry, revision, and chamber compatibility
  • Inspect for cracks, chips, arc marks, and contamination
  • Confirm cleaning/refurbishment status
Confirm with the seller
  • Exact Lam chamber variant and ceramic grade are not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

716-330915-001 / INSULATOR CERAMIC RING ESC 9600XX / LAM RESEARCH

716-330915-001 / INSULATOR CERAMIC RING ESC 9600XX / LAM RESEARCH

USD 600.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 9, 2026 23:46 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH (LAM) 716-330915-001 COORS CERAMICS CO.  INSUL, ESC 9600

LAM RESEARCH (LAM) 716-330915-001 COORS CERAMICS CO. INSUL, ESC 9600

USD 1268.95

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Sep 15, 2020 20:36 UTC
End recorded: Dec 7, 2024 14:10 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
15568 LAM RESEARCH RING,INSULATOR,CERAMIC (NEW) 716-330915-001

15568 LAM RESEARCH RING,INSULATOR,CERAMIC (NEW) 716-330915-001

USD 630.3700

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: NEW
Listed: Feb 24, 2020 05:22 UTC
End recorded: Dec 7, 2024 09:32 UTC
Estimated remaining at check: 2
Estimated sold at check: 1

eBay response captured — Checked Oct 20, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
716-330915-001 INSULATOR CERAMIC ESC 9600PTX

716-330915-001 INSULATOR CERAMIC ESC 9600PTX

USD 1125.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 29, 2019 19:14 UTC
End recorded: Dec 7, 2024 07:12 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:27 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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