Product description
Lam Research 716-330915-001 ceramic insulator ring for ESC use, associated with 9600 / 9408 etcher context.
Specifications and identifiers
identification
| Description | Ceramic ESC insulator ring |
|---|
| Reported context | Lam 9600 / 9408 etcher appears in evidence |
|---|
| Supplier/material note | Coors Ceramics appears in evidence |
|---|
Equipment context
- Lam 9600 / 9408 etcher ESC assembly
Applications
PVD/CVD/etch chamber kitswafer-area consumablesESC and focus-ring stacksESC insulationEtch chamber ceramic ring replacementProcess-facing insulator service
How it works
A shaped process-facing ring or chamber component used near a wafer, chuck, electrode, or gas path.
Geometry, material, coating, and cleanliness can affect plasma behavior, contamination risk, and fit.
Technical guide
aluminum
common lightweight chamber hardware material
ceramic
electrically insulating, process-compatible material used in chamber hardware
quartz
high-purity silica glass used in plasma or high-temperature environments
- ESC
- electrostatic chuck
What to verify before purchase
- Verify exact geometry, revision, and chamber compatibility
- Inspect for cracks, chips, arc marks, and contamination
- Confirm cleaning/refurbishment status
Confirm with the seller
- Exact Lam chamber variant and ceramic grade are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.