Product description
Upper gas inlet ring / upper quartz ring for Lam Research equipment; Applied Ceramics 92-00403B appears as a related quartz upper ring reference.
Specifications and identifiers
Equipment context
| Possible platform | Lam Research 9600 context appears in one description |
|---|
Identity
| Supported item noun | Upper gas inlet / upper quartz ring |
|---|
| Material/context | Quartz |
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| Cross reference | Applied Ceramics 92-00403B |
|---|
Applications
PVD/CVD/etch process chamberschamber rebuildsconsumable kitstool refurbishmentgas inlet ring replacementquartz process kit servicechamber rebuild
How it works
A mechanical chamber or process-area component used near the wafer, plasma, gas flow, or vacuum boundary of a semiconductor tool.
Geometry, coating, material, and revision can affect process uniformity, particle control, sealing, and compatibility with nearby assemblies.
What to verify before purchase
- Confirm exact quartz ring dimensions and revision
- Verify whether the platform is Lam 9600 or another Lam chamber configuration
Confirm with the seller
- Exact material grade and coating
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.