Lam Research 716-800842-005 Foc, Ring, Top, QTZ, 200mm, Jeida, Cleaned & SealedLam Research 716-800842-005 Foc, Ring, Top, QTZ, 200mm, Jeida UsedLam Research Quartz Focus Ring 716-800842-005Lam Research Quartz Focus Ring 716-800842-005Lam Research Quartz Focus Ring 716-800842-005Lam Research Quartz Focus Ring 716-800842-005Lam Research Quartz Focus Ring 716-800842-005Lam Research Quartz Focus Ring 716-800842-005Lam Research Quartz Focus Ring 716-800842-005Lam Research Quartz Focus Ring 716-800842-005Lam Research Quartz Focus Ring 716-800842-005LAM Research 716-800842-005 Foc, Ring, Top, QTZ, 200mm, JeidaLAM RESEARCH FOCUS,RING,TOP QTZ 200MM JEIDA 716-800842-005LAM RESEARCH FOCUS,RING,TOP QTZ 200MM JEIDA 716-800842-005LAM RESEARCH FOCUS,RING,TOP QTZ 200MM JEIDA 716-800842-005LAM RESEARCH FOCUS,RING,TOP QTZ 200MM JEIDA 716-800842-005LAM RESEARCH FOCUS,RING,TOP QTZ 200MM JEIDA 716-800842-005LAM RESEARCH FOCUS,RING,TOP QTZ 200MM JEIDA 716-800842-005
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LAM RESEARCH 716-800842-005

Top Quartz Focus Ring, 200mm

Market Availability & Pricing

Part number716-800842-005
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Focus Rings
Top Quartz Focus Ring, 200mm
LAM RESEARCH716-800842-005Quartz focus ring
Product description
Focus ring, top, quartz, 200mm JEIDA context, Lam Research 716-800842-005.
Specifications and identifiers
identification
Supported descriptionFocus ring, top, quartz, 200mm
Repeated description
MaterialQuartz
Repeated as QTZ/quartz
Wafer size200mm
Repeated context
ContextJEIDA
Appears in multiple descriptions
Applications
etch chambersCVD chamberswafer pedestalschamber linersPlasma chamber focus ring replacement200mm wafer process chamber consumable
How it works

A process ring or chamber ring is a shaped consumable or fixture used around the wafer/process region.

Ring geometry and material affect plasma confinement, spacing, particle performance, and process repeatability.

Technical guide
aluminum

Lightweight metal often anodized or coated for chamber use.

quartz

High-purity fused silica often used for plasma/thermal compatibility.

AL
aluminum
ID
inside diameter
OD
outside diameter
QTZ
quartz
What to verify before purchase
  • Verify chamber model, quartz grade, cleaned/sealed status, and JEIDA-specific fit.
  • Inspect chips, surface condition, and part marking.
Confirm with the seller
  • Exact chamber family is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research 716-800842-005 Foc, Ring, Top, QTZ, 200mm, Jeida, Cleaned & Sealed

Lam Research 716-800842-005 Foc, Ring, Top, QTZ, 200mm, Jeida, Cleaned & Sealed

USD 100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 19, 2024 07:28 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

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