Lam Research 716-803180-003 Rev. A +1092-11 15" ESC Electrostatic ChuckLam Research 716-803180-003 Rev. A +1092-11 15" ESC Electrostatic ChuckLam Research 716-803180-003 Rev. A +1092-11 15" ESC Electrostatic ChuckLam Research 716-803180-003 Rev. A +1092-11 15" ESC Electrostatic ChuckLam Research 716-803180-003 Rev. A +1092-11 15" ESC Electrostatic ChuckLam Research 716-803180-003 Rev. A +1092-11 15" ESC Electrostatic ChuckLam Research 716-803180-003 Rev. A +1092-11 15" ESC Electrostatic ChuckLam Research 716-803180-003 Rev. A +1092-11 Assembly Semiconductor PartLam Research 716-803180-003 Rev. A +1092-11 Assembly Semiconductor PartLam Research 716-803180-003 Rev. A +1092-11 Assembly Semiconductor PartLam Research 716-803180-003 Rev. A +1092-11 Assembly Semiconductor PartLam Research 716-803180-003 Rev. A +1092-11 Assembly Semiconductor PartLam Research 716-803180-003 Rev. A +1092-11 Assembly Semiconductor PartLam Research 716-803180-003 Rev. 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A +1092-11 Assembly Semiconductor PartLam Research 716-803180-003 Rev. A +1092-11 Assembly Semiconductor Part
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LAM RESEARCH 716-803180-003

15 inch ESC Electrostatic Chuck

Market Availability & Pricing

Part number716-803180-003
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales214.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Wafer Handling & Chucks › Electrostatic Chucks
15 inch ESC Electrostatic Chuck
LAM RESEARCH716-803180-003Electrostatic chuck
Product description
15 inch ESC electrostatic chuck assembly, Rev. A +1092-11 context
Specifications and identifiers
observed
Description15 inch ESC Electrostatic Chuck
Title explicitly identifies ESC.
Revision/contextRev. A +1092-11
Revision/context should be verified.
Applications
Lam process chambersWafer clampingESC replacementElectrostatic chuck replacement
How it works

An electrostatic chuck holds a wafer or substrate using electrostatic force during processing.

ESCs require exact electrical, mechanical, thermal, and process compatibility and are sensitive to surface damage.

What to verify before purchase
  • Confirm revision, markings, connector configuration, and compatibility with the exact tool BOM.
  • Verify tested/refurbished/used condition.
Confirm with the seller
  • Exact tool model
  • Chuck voltage/zones
  • Surface condition

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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