Product description
Lam Research 8 in ESC cap electrode / chuck electrode component, with cap and ground-ring wording referenced.
Specifications and identifiers
identification
| ESC context | 8 in ESC Electrostatic chuck component for 200 mm class wafer handling. |
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| Component wording | Cap electrode / chuck electrode Descriptions identify it as an electrode/chuck-related cap component. |
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| Additional context | GD ring / NCH Abbreviated context terms appear and should be verified against drawings. |
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Applications
ESC rebuildsEtch/deposition chamber wafer supportLam chamber consumablesESC/chuck component serviceWafer clamping electrode replacement
How it works
A esc cap electrode used as a replaceable semiconductor-equipment or industrial-tool component.
Correct identification matters because fit, connector style, calibration, cleanliness, and revision can determine whether the part will install and operate correctly.
Technical guide
ESC
Electrostatic chuck system that holds wafers using electrostatic force.
electrode
Conductive element used in the chuck assembly or RF/plasma interface.
- GD ring
- Likely ground/guard ring context; exact meaning should be verified.
- NCH
- Abbreviation not expanded from evidence.
What to verify before purchase
- Whether this is a cap, electrode, or complete chuck component
- Diameter and notch configuration
- Surface condition
- Chamber model
Confirm with the seller
- Exact tool configuration beyond supported references
- Current operational condition
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.