Product description
Guide bearing and leaf spring assembly, VAT 80642-R1 context, for Lam Research equipment.
Specifications and identifiers
assembly identity
| Component type | Guide bearing and leaf spring assembly |
|---|
| VAT reference | 80642-R1 |
|---|
| Arm context | 10 inch arm Referenced in some source evidence; verify if applicable to the specific unit. |
|---|
Applications
Cassette/indexer motionRobot transfer mechanismsValve and arm guide hardwareGuide bearing/spring replacementVacuum valve or arm mechanism service
How it works
A motion assembly uses motors, bearings, springs, or mechanical linkages to move wafers or tool mechanisms.
Motor model, orientation, travel, bearing fit, and mounting geometry determine whether the assembly fits and performs correctly.
Technical guide
guide_bearing
A bearing that constrains or guides moving parts along a path.
stepper_motor
A motor that moves in discrete steps for controlled positioning.
- VAT
- Vacuum valve/vendor context referenced by the provided evidence.
- Vexta
- Oriental Motor/Vexta motor brand referenced by the provided evidence.
What to verify before purchase
- Verify VAT reference, bearing condition, spring form, quantity, and arm/application fit.
- Confirm whether supplied hardware includes only the bearing/spring or a larger assembly.
Confirm with the seller
- Exact machine location and quantity per assembly are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.