Product description
Vacuum / atmosphere switch, 1/4 VCR, Wasco SV129-31W2A-X/6530 context
Specifications and identifiers
supported identity
| Function | Vacuum/atmosphere switching or sensing Switches or senses a vacuum/ATM condition. |
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| Connection | 1/4 VCR Connection type appears repeatedly. |
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| Vendor/model context | Wasco SV129-31W2A-X/6530 Vendor model reference appears in evidence. |
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Applications
wafer handlingload-lock safetyprocess endpoint detectiontool alignmentVacuum/atmosphere status sensingLoad-lock or gasline pressure interlockLam vacuum subsystem service
How it works
A vacuum switch senses, detects, or indicates a physical condition such as wafer presence, pressure, endpoint, or alignment.
Sensors and detector modules support interlocks, automation, process monitoring, and calibration.
Technical guide
common
Sensor assemblies may include optics, switches, electronics, cables, and mounting brackets.
sensing
Semiconductor tools use sensors to confirm safe states and process conditions.
- ATM
- Atmosphere or atmospheric pressure context.
- endpoint
- A detected process condition used to determine process completion.
What to verify before purchase
- Confirm setpoint, electrical contacts, and connector style.
- Verify 1/4 VCR interface and sealing condition.
- Test switching behavior before installation.
Confirm with the seller
- Exact pressure setpoint is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.