Product description
Lam Research flow switch using Proteus Industries 98008SA10F3P2, identified in Rev A and Rev C variants.
Specifications and identifiers
identification
| Function | Flow switch / flow sensor Detects cooling or utility fluid flow for tool interlock or monitoring. |
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| Vendor model | Proteus Industries 98008SA10F3P2 Model associated with this part number. |
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reported revisions
| Revision | Rev A and Rev C identified Revision should be matched to the target assembly. |
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Applications
cooling-water monitoringvacuum or pressure monitoringcassette/wafer presence detectiontool interlockscooling-water flow interlockfacility fluid-flow monitoringLam tool utility monitoring
How it works
A sensor or switch used to detect flow, pressure, presence, or equipment state.
Setpoint, output type, response time, wetted materials, and connector style must match the tool control circuit.
Technical guide
rf_power
RF power systems often use generators, matching networks, and interlocks to stabilize energy delivery to a chamber.
- H2O
- Water; often used in tool utility cooling or flow-monitoring context.
- RF
- Radio frequency; in plasma tools this commonly refers to power used to generate or bias plasma.
What to verify before purchase
- Flow range and switch setpoint
- Wetted material and fitting size
- Electrical output type and connector
- Revision compatibility
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.