Lam Research 771-001032-014 C Proteus Industries 98008SA10F3P2 Flow switch,~A099Lam Research 771-001032-014 Rev C,Proteus 98008SA10F3P2 Flow switch,Used,GE+95451PC LAM RESEARCH 771-001032-014 Rev.C PROTEUS 98008SA10F3P2 Flow Switch1PCS PROTEUS 98008SA10F3P2 LAM 771-001032-014  (3-month warranty/SHIP DHL)Lam Research 771-001032-014 Rev. C Proteus 98008SA10F3P2 Flow SwitchLAM Research 771-001032-014 Proteus 98008SA10F3P2 Flow Switch Controller,US&7975PROTEUS INDUSTRIES 98008SA10F3P2 FLOW SWITCH LAM PN 771-001032-014 REV.CLam 771-001032-014 Rev C Proteus Industries 98008SA10F3P2,1002600,Used,US^7124	LAM Research 771-001032-014 Rev C Proteus 98008SA10F3P2,1002600,Used,US$6958PROTEUS INDUSTRIES 98008SA10F3P2 FLOW SWITCH LAM PN 771-001032-014 REV.CPROTEUS INDUSTRIES 98008SA10F3P2 FLOW SWITCH LAM PN 771-001032-014 REV.CPROTEUS INDUSTRIES 98008SA10F3P2 FLOW SWITCH LAM PN 771-001032-014 REV.ANew LAM 771-001032-014 Model: 98008SA10F3P2 Flow Sensor
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LAM RESEARCH 771-001032-014

Proteus Flow Switch

Market Availability & Pricing

Part number771-001032-014
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales599 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Sensors › Flow Sensors › Flow Switches
Proteus Flow Switch
LAM RESEARCH771-001032-014Flow switch
Product description
Lam Research flow switch using Proteus Industries 98008SA10F3P2, identified in Rev A and Rev C variants.
Specifications and identifiers
identification
FunctionFlow switch / flow sensor
Detects cooling or utility fluid flow for tool interlock or monitoring.
Vendor modelProteus Industries 98008SA10F3P2
Model associated with this part number.
reported revisions
RevisionRev A and Rev C identified
Revision should be matched to the target assembly.
Applications
cooling-water monitoringvacuum or pressure monitoringcassette/wafer presence detectiontool interlockscooling-water flow interlockfacility fluid-flow monitoringLam tool utility monitoring
How it works

A sensor or switch used to detect flow, pressure, presence, or equipment state.

Setpoint, output type, response time, wetted materials, and connector style must match the tool control circuit.

Technical guide
rf_power

RF power systems often use generators, matching networks, and interlocks to stabilize energy delivery to a chamber.

H2O
Water; often used in tool utility cooling or flow-monitoring context.
RF
Radio frequency; in plasma tools this commonly refers to power used to generate or bias plasma.
What to verify before purchase
  • Flow range and switch setpoint
  • Wetted material and fitting size
  • Electrical output type and connector
  • Revision compatibility
Confirm with the seller
  • Specific fluid type

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research 771-001032-014 C Proteus Industries 98008SA10F3P2 Flow switch,~A099

Lam Research 771-001032-014 C Proteus Industries 98008SA10F3P2 Flow switch,~A099

USD 269.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 25, 2026 04:16 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 15, 2026 16:26 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research 771-001032-014 Rev C,Proteus 98008SA10F3P2 Flow switch,Used,GE+9545

Lam Research 771-001032-014 Rev C,Proteus 98008SA10F3P2 Flow switch,Used,GE+9545

USD 299.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Apr 23, 2025 04:58 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
1PC LAM RESEARCH 771-001032-014 Rev.C PROTEUS 98008SA10F3P2 Flow Switch

1PC LAM RESEARCH 771-001032-014 Rev.C PROTEUS 98008SA10F3P2 Flow Switch

USD 449.9900

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jun 6, 2024 12:02 UTC
End recorded: Jan 16, 2026 13:22 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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