Product description
Lam Research Fujikin/Ihara pneumatic valve manifold assembly, type N.C. with operating-pressure wording in one source.
Specifications and identifiers
valve identity
| Vendor/series | Fujikin / Ihara Vendor wording appears in multiple sources. |
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| Item noun | Pneumatic valve manifold Repeated item identity. |
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| Operation wording | N.C.; 0.4–0.6 MPa Normally closed / pressure wording appears and should be verified on the actual part. |
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Applications
gas boxesvacuum isolationslit valve and load-lock mechanismsprocess fluid deliverygas manifold valve assemblypneumatic valve replacement
How it works
A valve assembly controls, isolates, or meters gas, liquid, or vacuum paths in a semiconductor tool.
Correct valve style, seal material, port pattern, and actuator type are critical for process integrity and leak-free operation.
Technical guide
APC
Automatic pressure control, often implemented through pressure-control valve hardware.
What to verify before purchase
- Verify Fujikin/Ihara vendor marking and valve count/port configuration.
- Confirm normal state, pressure range, and seal compatibility.
Confirm with the seller
- Exact tool configuration and compatibility are not confirmed beyond the part identity.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.