PQ5055 Valve Fuijikin Lam Research 796-029684-321L10678 (LOT OF 6) LAM RESEARCH FUJIKIN PNEUMATIC VALVE MANIFOLD 796-029684-32129770 LAM RESEARCH IHARA MANF VLV ASSY, TYPE N.C. O.P. 0.4~0.6MPA 796-029684-32110678 LAM RESEARCH FUJIKIN PNEUMATIC VALVE ASSEMBLY MANIFOLD 796-029684-321LAM RESEARCH 796-029684-321 FUJIKIN PNEUMATIC VALVE ASSEMBLY MANIFOLD, NEW10678 LAM RESEARCH FUJIKIN PNEMATIC VALVE ASSEMBLY MANIFOLD 796-029684-32110678 LAM RESEARCH FUJIKIN PNEMATIC VALVE ASSEMBLY MANIFOLD 796-029684-321As-Is Lam 796-029684-321 GAS INNER OUTER10678 LAM RESEARCH FUJIKIN PNEMATIC VALVE ASSEMBLY MANIFOLD 796-029684-321LAM RESEARCH Fujikin Pneumatic Valve Manifold 796-029684-321
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LAM RESEARCH 796-029684-321

Fujikin Pneumatic Valve Manifold

Market Availability & Pricing

Part number796-029684-321
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales700 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Vacuum › Gas Delivery › Valve Manifolds
Fujikin Pneumatic Valve Manifold
LAM RESEARCH796-029684-321pneumatic valve manifold
Product description
Lam Research Fujikin/Ihara pneumatic valve manifold assembly, type N.C. with operating-pressure wording in one source.
Specifications and identifiers
valve identity
Vendor/seriesFujikin / Ihara
Vendor wording appears in multiple sources.
Item nounPneumatic valve manifold
Repeated item identity.
Operation wordingN.C.; 0.4–0.6 MPa
Normally closed / pressure wording appears and should be verified on the actual part.
Applications
gas boxesvacuum isolationslit valve and load-lock mechanismsprocess fluid deliverygas manifold valve assemblypneumatic valve replacement
How it works

A valve assembly controls, isolates, or meters gas, liquid, or vacuum paths in a semiconductor tool.

Correct valve style, seal material, port pattern, and actuator type are critical for process integrity and leak-free operation.

Technical guide
APC

Automatic pressure control, often implemented through pressure-control valve hardware.

What to verify before purchase
  • Verify Fujikin/Ihara vendor marking and valve count/port configuration.
  • Confirm normal state, pressure range, and seal compatibility.
Confirm with the seller
  • Exact tool configuration and compatibility are not confirmed beyond the part identity.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

PQ5055 Valve Fuijikin Lam Research 796-029684-321

PQ5055 Valve Fuijikin Lam Research 796-029684-321

USD 272.1800

Observed public listing price, not an accepted sale amount.

Observed active at check time
DE
Condition: Used
Listed: Oct 1, 2025 14:55 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
L10678 (LOT OF 6) LAM RESEARCH FUJIKIN PNEUMATIC VALVE MANIFOLD 796-029684-321

L10678 (LOT OF 6) LAM RESEARCH FUJIKIN PNEUMATIC VALVE MANIFOLD 796-029684-321

USD 2688.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 24, 2024 06:02 UTC
End recorded: Dec 7, 2024 11:18 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
29770 LAM RESEARCH IHARA MANF VLV ASSY, TYPE N.C. O.P. 0.4~0.6MPA 796-029684-321

29770 LAM RESEARCH IHARA MANF VLV ASSY, TYPE N.C. O.P. 0.4~0.6MPA 796-029684-321

USD 448.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Sep 23, 2022 05:30 UTC
End recorded: Dec 7, 2024 06:13 UTC
Estimated remaining at check: 5
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
10678 LAM RESEARCH FUJIKIN PNEUMATIC VALVE ASSEMBLY MANIFOLD 796-029684-321

10678 LAM RESEARCH FUJIKIN PNEUMATIC VALVE ASSEMBLY MANIFOLD 796-029684-321

USD 977.1600

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Aug 12, 2022 04:32 UTC
End recorded: Dec 6, 2024 22:19 UTC
Estimated remaining at check: 46
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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