796-093088-004 / ADAPTIVE PRESSURE CONTROLLER / LAM RESEARCH CORPORATIONVAT PM-5 Adaptive Pressure Controller, Lam Research 796-093088-004, 105097VAT PM-5 Adaptive Pressure Controller, Lam Research 796-093088-004, 105046796-093088-004 / ADAPTIVE PRESSURE CONTROLLER / LAM RESEARCH CORPORATION796-093088-004 / ADAPTIVE PRESSURE CONTROLLER / LAM RESEARCH CORPORATION796-093088-004 / ADAPTIVE PRESSURE CONTROLLER / LAM RESEARCH CORPORATIONVAT PM-5 Adaptive Pressure Controller, LAM 796-093088-004, 399276VAT PM-5 Adaptive Pressure Controller, LAM 796-093088-004, 399274VAT PM-5 Adaptive Pressure Controller, LAM 796-093088-004, 409005VAT PM-5 Adaptive Pressure Controller, LAM 796-093088-004, 399275VAT PM-5 Adaptive Pressure Controller, LAM 796-093088-004, 400486LAM 796-093088-004, Controller, Adapter Pressure VLV. 417040VAT throttle valve controller PM-5, 641PM-36PM-1011/292, LAM 796-093088-004VAT throttle valve controller PM-5, 641PM-36PM-1006/111, LAM 796-093088-004
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LAM RESEARCH 796-093088-004

VAT PM-5 adaptive pressure controller

Market Availability & Pricing

Part number796-093088-004
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Vacuum › Valves & Fittings › Throttle Valve Controllers
VAT PM-5 adaptive pressure controller
LAM RESEARCH796-093088-004Adaptive Pressure Controller
Product description
VAT PM-5 adaptive pressure/throttle valve controller associated with Lam Research part 796-093088-004.
Specifications and identifiers
identified attributes
Vendor/model familyVAT PM-5
Functionadaptive pressure controller / throttle valve controller
Associated OEMLam Research
Applications
vacuum throttle valve controlprocess chamber pressure regulationVAT PM-series control assemblieschamber pressure controlthrottle valve control
How it works

An adaptive pressure controller controls or coordinates a throttle valve to regulate chamber pressure.

Stable pressure control is critical for repeatable etch, deposition, and vacuum process conditions.

Technical guide
adaptive_pressure_control

Controller adjusts valve position based on pressure feedback.

PM-5
VAT adaptive pressure controller family/model wording found in the evidence.
What to verify before purchase
  • Confirm exact OEM part number and revision on the physical part or packaging.
  • Verify dimensions, connectors, fittings, and configuration against the installed tool assembly.
  • Confirm cleanliness/condition requirements for semiconductor service.
Confirm with the seller
  • Exact tool compatibility beyond the machine/platform names explicitly present in the evidence.
  • Complete OEM specifications, revision interchangeability, and lifecycle status.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

796-093088-004 / ADAPTIVE PRESSURE CONTROLLER / LAM RESEARCH CORPORATION

796-093088-004 / ADAPTIVE PRESSURE CONTROLLER / LAM RESEARCH CORPORATION

USD 4650.5400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 25, 2026 23:21 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
VAT PM-5 Adaptive Pressure Controller, Lam Research 796-093088-004, 105097

VAT PM-5 Adaptive Pressure Controller, Lam Research 796-093088-004, 105097

USD 7500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 21, 2022 00:00 UTC
End recorded: Dec 7, 2024 01:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
VAT PM-5 Adaptive Pressure Controller, Lam Research 796-093088-004, 105046

VAT PM-5 Adaptive Pressure Controller, Lam Research 796-093088-004, 105046

USD 7500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 19, 2022 20:00 UTC
End recorded: Jan 23, 2025 11:04 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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