Product description
MKS CV16-K1K1-MKVV compact vacuum valve / manual knob NW/KF-16 angle valve for Lam Research equipment.
Specifications and identifiers
identification
| Function | Compact vacuum angle valve Manual vacuum valve used to isolate or control a KF/NW vacuum line. |
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| Vendor model | MKS CV16-K1K1-MKVV Model associated with this part number. |
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| Fitting size | NW/KF-16 Small-flange vacuum connection size associated with this part number. |
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Applications
vacuum linesfacility cooling watergas or pump linesprocess utility plumbingKF16 vacuum line isolationmanual service valve replacementLam vacuum subsystem hardware
How it works
A valve assembly used to control gas, cooling water, vacuum, or process flow in a semiconductor tool.
Port style, actuation method, seal material, pressure rating, and cleanliness determine whether the valve is suitable for a given tool location.
Technical guide
- KF/NW
- Small-flange vacuum fitting standards commonly used for foreline and roughing vacuum connections.
What to verify before purchase
- Actual port size and orientation
- Seal material and cleanliness grade
- Knob/actuator style
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.