Product description
Lam Research 796-801289-001 high-vacuum/right-angle valve assembly associated with MKS 93-6127 and limit-switch/soft-start context.
Specifications and identifiers
identification
| Valve type | High-vacuum right-angle / isolation valve Vacuum valve used in high-vacuum or process isolation service. |
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| Associated vendor/model | MKS 93-6127 Vendor model repeatedly associated with this Lam part. |
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| Features | Limit switch / soft start Position feedback or controlled actuation features are referenced and should be verified. |
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Applications
vacuum forelinesgas delivery panelsloadlockspump and exhaust pathsvacuum isolationloadlock or process chamber vacuum controlvalve position feedback
How it works
A valve used to control, isolate, vent, or regulate gas or vacuum flow in semiconductor equipment.
Valve selection affects vacuum integrity, gas delivery, safety, and process repeatability.
Technical guide
limit switch
A limit switch can indicate the open or closed position of a valve to the control system.
- soft start
- In valve context, soft-start behavior can indicate controlled opening to reduce pressure shock or particle movement.
What to verify before purchase
- Verify MKS model, port size, actuator style, and limit-switch wiring.
- Confirm whether soft-start function is required.
Confirm with the seller
- Exact flange size and actuation voltage are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.