Product description
Tylan FC-2900M mass flow controller, 200 SCCM SF6, associated with Lam Research part 797-091413-509.
Specifications and identifiers
identification
| Vendor/model | Tylan FC-2900M MFC model associated with the part number. |
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| Flow range | 200 SCCM Full-scale flow associated with the MFC configuration. |
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| Gas | SF6 Calibration/application gas associated with the MFC configuration. |
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Applications
process gas deliveryetch gas controlCVD gas flow controlSF6 process gas flow controletch gas delivery
How it works
A mass flow controller meters and controls a specified gas flow rate.
Gas type, full-scale range, calibration gas, and fittings must match the process recipe and gas line.
Technical guide
- MFC
- MFC means mass flow controller.
- SCCM
- SCCM means standard cubic centimeters per minute.
- SF6
- Sulfur hexafluoride is often used in etch processes.
What to verify before purchase
- Confirm calibration gas, range, fittings, valve type, and whether recalibration is required.
Confirm with the seller
- Electrical interface and fitting type are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.