Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6 Tylan FC-2900M MFC LAM RESEARCH 797-091413-509 200 SCCM SF6
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LAM RESEARCH 797-091413-509

Tylan FC-2900M SF6 Mass Flow Controller

Market Availability & Pricing

Part number797-091413-509
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Gas Delivery › Mass Flow › Mass Flow Controllers
Tylan FC-2900M SF6 Mass Flow Controller
LAM RESEARCH797-091413-509mass flow controller
Product description
Tylan FC-2900M mass flow controller, 200 SCCM SF6, associated with Lam Research part 797-091413-509.
Specifications and identifiers
identification
Vendor/modelTylan FC-2900M
MFC model associated with the part number.
Flow range200 SCCM
Full-scale flow associated with the MFC configuration.
GasSF6
Calibration/application gas associated with the MFC configuration.
Applications
process gas deliveryetch gas controlCVD gas flow controlSF6 process gas flow controletch gas delivery
How it works

A mass flow controller meters and controls a specified gas flow rate.

Gas type, full-scale range, calibration gas, and fittings must match the process recipe and gas line.

Technical guide
MFC
MFC means mass flow controller.
SCCM
SCCM means standard cubic centimeters per minute.
SF6
Sulfur hexafluoride is often used in etch processes.
What to verify before purchase
  • Confirm calibration gas, range, fittings, valve type, and whether recalibration is required.
Confirm with the seller
  • Electrical interface and fitting type are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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