Product description
Lam Research serial I/O PCB assembly, commonly referenced as Rev. D/SIO board.
Specifications and identifiers
board
| Function | Serial I/O interface |
|---|
| Revision context | Rev. D reported Verify physical board revision. |
|---|
Applications
Control electronicsI/O interface assembliesSemiconductor equipment backplanes and interconnectsSerial communication I/OLam tool controller interface
How it works
A printed circuit board assembly used for control, interface, signal routing, or subsystem electronics.
Board revision, firmware/PROM contents, connector population, and supported platform must match the tool configuration.
What to verify before purchase
- Verify board revision, serial I/O configuration, and connector/keying compatibility.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.