Product description
PCB assembly for ESC filter / BICEP II DC probe circuitry, Lam Research part 810-006490-006.
Specifications and identifiers
identification
| Function indicated | ESC filter / BICEP II DC probe PCB assembly |
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| Revision references | Rev. B and Rev. C appear in source evidence Revision must be checked against the installed tool configuration. |
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Equipment context
- Lam BICEP II / ESC-related subsystem
Applications
equipment control cabinetstool interlock and sensor systemsservice replacement and board-level troubleshootingelectrostatic chuck filteringDC probe signal interfaceboard-level service replacement
How it works
A filter and probe-interface PCB is an electronic board used to route, condition, monitor, or control signals inside semiconductor equipment.
Correct board identity matters because revisions, firmware, connectors, and machine configuration can affect compatibility.
Technical guide
- I/O
- Input/output signal interface.
- PCB
- Printed circuit board.
- PCBA
- Printed circuit board assembly.
What to verify before purchase
- Confirm revision and board markings
- Verify BICEP/BICEPP spelling against the nameplate or BOM
- Check connector layout and installed firmware if applicable
Confirm with the seller
- Exact Lam chamber/tool model
- Electrical ratings
- Interchangeability between revisions
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.