810-015987-003 / PCB TCP AUTOTUNE BOARD / LAM RESEARCH CORPORATION810-015987-003 / PCB TCP AUTOTUNE BOARD / LAM RESEARCH CORPORATION810-015987-003 Lam Research TCP Auto tune PCBLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research  810-015987-003 / 810-15987-003 - PCB, Assembly Autotune TCPLam Research OnTrak 810-015987-003 - PCB, ASSEMBLY AUTOTUNE TCPLAM 810-015987-003 TCP autotune PCB board assyLAM RESEARCH 810-015987-003 PCB, ASSEMBLY AUTOTUNE TCP REV 3
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LAM RESEARCH 810-015987-003

TCP Autotune PCB Assembly

Market Availability & Pricing

Part number810-015987-003
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales1599 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › Matching & Autotune Boards
TCP Autotune PCB Assembly
LAM RESEARCH810-015987-003TCP autotune PCB
Product description
PCB assembly, autotune TCP, for Lam Research equipment.
Specifications and identifiers
board identity
FunctionAutotune TCP PCB assembly
Technology contextTCP
Transformer-coupled plasma context in Lam equipment.
revision context
Revision contextRev 3 appears in provided evidence
Applications
Tool controller chassisRemote I/O and interlock systemsProcess equipment control cabinetsRF/plasma autotune control boardTCP-related matching or tuning subsystem electronics
How it works

A printed circuit board assembly used for control, I/O, interface, sensing, or communication functions inside semiconductor equipment.

Board revision, bus/interface type, connector population, firmware, and OEM cross-reference can determine whether a board is compatible with a tool.

Technical guide
RS-232/RS-485

Serial communication standards commonly used for equipment gateways and device interfaces.

analog_io

Analog I/O boards handle voltage or current signals from sensors and actuators.

digital_io

Digital I/O boards switch or read discrete on/off signals.

FAB
Fabrication or board fabrication number when used on PCB markings.
I/O
Input/output.
PCB
Printed circuit board.
PCBA
Printed circuit board assembly.
What to verify before purchase
  • Verify revision, board markings, installed firmware, connector configuration, and whether the alternate number 810-15987-003 applies.
  • Confirm compatibility with the tool RF/tuning subsystem.
Confirm with the seller
  • Exact matching-network configuration is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

810-015987-003 / PCB TCP AUTOTUNE BOARD / LAM RESEARCH CORPORATION

810-015987-003 / PCB TCP AUTOTUNE BOARD / LAM RESEARCH CORPORATION

USD 1295.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 14, 2026 22:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 15, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
810-015987-003 / PCB TCP AUTOTUNE BOARD / LAM RESEARCH CORPORATION

810-015987-003 / PCB TCP AUTOTUNE BOARD / LAM RESEARCH CORPORATION

USD 1447.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 11, 2026 16:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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