Lam Research ESC PWR SPLY 810-107813-105 (New Open Box)Lam Research 810-107813-105 ESC Power Supply Module Board Assembly Rev ALam Research ESC Power Supply ESC PWR SPLY 810-107813-105810-107813-105 Lam Research ESC Power Supply ESC PWR SPLY Lam Research ESC Power Supply ESC PWR SPLY 810-107813-105Lam Research 810-107813-105 ESC Power Supply Module Board Assembly Rev ALam Research ESC Power Supply Board 810-107813-105 Rev. BLam Research ESC PWR SPLY 810-107813-105LAM Research 810-107813-105 ESC Power SupplyLAM Research 810-107813-105 ESC Power Supply Board 617765059 810107813105 NewLAM Research 810-107813-105 ESC Power SupplyLAM RESEARCH 810-107813-105 ESC POWER SUPPLY BOARDLAM RESEARCH 810-107813-105 ESC POWER SUPPLY BOARDLam Research 810-107813-105 ESC PWR SPLY Power Supply Board
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LAM RESEARCH 810-107813-105

ESC power supply board

Market Availability & Pricing

Part number810-107813-105
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales3230 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › Power Supplies › ESC Power Supplies
ESC power supply board
LAM RESEARCH810-107813-105ESC power supply board
Product description
Lam Research ESC power supply board / ESC PWR SPLY module board assembly, reported with revisions A/B.
Specifications and identifiers
function
FunctionESC power supply board
Power supply board for electrostatic chuck subsystem.
revision notes
Revisions mentionedRev A / Rev B
Multiple revisions appear; confirm required revision.
Applications
electrostatic chuck power supply assembliesplasma etch toolswafer clamping subsystemsESC power supply repairWafer chucking subsystem maintenanceLam Research tool electronics replacement
How it works

A power-supply board used in an electrostatic chuck power subsystem.

ESC power controls wafer clamping; incorrect boards can affect chucking, wafer handling, and safety interlocks.

Technical guide
ESC

Electrostatic chuck, used to hold wafers by electrostatic force.

AMAT
Common abbreviation for Applied Materials.
ASSY
Assembly.
PCB
Printed circuit board.
PWB
Printed wiring board; often used interchangeably with PCB.
PWR SPLY
Power supply.
REV
Revision level; confirm against the required tool configuration.
What to verify before purchase
  • Confirm board revision and module compatibility.
  • Check connector configuration and power-supply assembly part number.
Confirm with the seller
  • Exact Lam platform and voltage output are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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