Lam Research  ESC PWR SPLY 810-107813-107 (New Open Box)4AA12-N4-I10-Y83-M 810-107813-107 Lam Research ESC Power Supply ESC PWR SPLYNew In Box 810-107813-107 Lam Research Free Shipping Fast Delivery US StockLam Research 810-107813-107 Module New Unopened US Stock Fast Free ShippingLam Research ESC PWR SPLY 810-107813-107Lam Research ESC PWR SPLY 810-107813-107 (As-Is)LAM Research 810-107813-107 Rev C 365 Min ESC PWR SPLY Board,Used,US^7147810-107813-107 Lam Research ESC Power Supply ESC PWR SPLY Lam Research ESC Power Supply ESC PWR SPLY 810-107813-107Lam Research ESC PWR SPLY 810-107813-107Lam Research ESC PWR SPLY 810-107813-107Lam Research  ESC PWR SPLY 810-107813-107LAM RESEARCH  810-107813-107 ESC Power Supply BoardLam Research ESC Power Supply Board 810-107813-107 Rev. CLAM RESEARCH  810-107813-107 ESC Power Supply Board
Image 1 of 15

LAM RESEARCH 810-107813-107

ESC Power Supply Board

Market Availability & Pricing

Part number810-107813-107
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales1800 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Power › Power Supplies › Electrostatic Chuck Power Supplies
ESC Power Supply Board
LAM RESEARCH810-107813-107ESC power supply board
Product description
ESC power supply / ESC PWR SPLY board assembly, Lam Research 810-107813-107.
Specifications and identifiers
key details
FunctionESC power supply
Provides power for electrostatic chuck clamping circuitry.
Assembly formboard/module
Wording supports both power supply board and module-style replacement.
Revision observedRev C
Revision should be checked against the installed system.
Applications
ESC powerrack powerDC suppliesheater or actuator power controlelectrostatic chuck power subsystemwafer clamping power controlLam Research chamber service
How it works

A power conversion or control module used to provide regulated electrical power to tool subsystems.

Voltage/current ratings, output type, and control interface must match the original equipment to avoid damage.

Technical guide
ESC

Electrostatic chuck; may require specialized high-voltage power supplies.

UPS

Uninterruptible power supply.

What to verify before purchase
  • Verify output voltage/current and ESC compatibility.
  • Confirm revision and connector layout.
  • Inspect for burn marks or high-voltage insulation damage before installation.
Confirm with the seller
  • Exact ESC/chamber model is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research  ESC PWR SPLY 810-107813-107 (New Open Box)

Lam Research ESC PWR SPLY 810-107813-107 (New Open Box)

USD 3230.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Mar 17, 2024 05:02 UTC
End recorded: Dec 7, 2024 08:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
4AA12-N4-I10-Y83-M 810-107813-107 Lam Research ESC Power Supply ESC PWR SPLY

4AA12-N4-I10-Y83-M 810-107813-107 Lam Research ESC Power Supply ESC PWR SPLY

USD 699.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
CN
Condition: NEW
Listed: Sep 22, 2022 10:05 UTC
End recorded: Dec 7, 2024 11:18 UTC
Estimated remaining at check: 1
Estimated sold at check: 4

eBay response captured — Checked Sep 30, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.