| Device type | ESC power board / power module Sources use both specific ESC power board and generic power module wording |
|---|---|
| Revision clue | Rev A One source title identifies revision A |
| Alternate part format | 810-107813R117 / 810-107813-R117 Listings show multiple formatting variants of the same number |
An ESC power board supplies or controls power related to an electrostatic chuck subsystem.
ESC power hardware is critical for wafer clamping, process stability, and safe tool operation; exact board revision and compatibility matter.
An electrostatic chuck uses electrical fields to hold a wafer or substrate during processing.
Stable chuck power supports wafer retention, heat transfer, and process uniformity.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 1, 2026 16:00 UTC
Availability has not been rechecked; current availability is unknown.
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View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 5, 2026 16:06 UTC
Availability has not been rechecked; current availability is unknown.
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View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 15, 2026 16:31 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 3, 2026 16:24 UTC
Availability has not been rechecked; current availability is unknown.
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View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 3, 2026 16:18 UTC
Availability has not been rechecked; current availability is unknown.
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View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 2, 2026 16:14 UTC
Availability has not been rechecked; current availability is unknown.
Buy It Now
View on eBay0 matching listings.
No active-status direct listings are shown on this page.
Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 10 | 1778.0000 | 5968.0000 | 3838.6430000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Sep 17, 2026 09:44 UTC | NEW IN BOX 810-107813-117 Lam Research Factory Sealed 1 Year Warranty | Completed listing price | 5968 (currency not captured) | Not established |
| Sep 16, 2026 01:23 UTC | Brand New Lam Research 810-107813-117 Power Module US Stock Fast Free Shipping | Completed listing price | 5793.26 (currency not captured) | Not established |
| Sep 9, 2026 10:52 UTC | Lam Research Brand New 810-107813-R117 Power Module US Stock Fast Free Shipping | Completed listing price | 5850 (currency not captured) | Not established |
| Aug 25, 2026 10:26 UTC | Lam Research ESC PWR SPLY 810-107813-117 (JABM25126259) (As-Is) | Completed listing price | 1778 (currency not captured) | Not established |
| Oct 17, 2024 01:09 UTC | 32598 LAM RESEARCH PCB, ESC PWR SPLY (PARTS) 810-107813-117 | Completed listing price | 952.57 (currency not captured) | Not established |
| Sep 3, 2022 13:12 UTC | Lam Research 810-107813-117 B ESC Power Supply+810-275260-001 E Relay Adapt&7992 | Completed listing price | 599 (currency not captured) | Not established |
| Nov 9, 2021 07:56 UTC | Lam Research ESC PWR SUPPLY Board 810-107813-117 ESC FILTER BICEP II | Completed listing price | 1620 (currency not captured) | Not established |
| Sep 9, 2021 05:32 UTC | Lam Research ESC PWR SPLY 810-107813-117 | Completed listing price | 1471.8 (currency not captured) | Not established |
| Dec 24, 2020 05:54 UTC | Lam Research ESC Power Supply ESC PWR SPLY 810-107813-117 | Completed listing price | 1463 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Sep 23, 2026 16:12 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Sep 22, 2026 16:10 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Sep 22, 2026 16:09 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Aug 27, 2026 16:02 UTC
Availability has not been rechecked; current availability is unknown.
Buy It Now
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Verification lookup unavailable; legacy status shown — Last attempted Aug 28, 2026 16:12 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Verification lookup unavailable; legacy status shown — Last attempted Aug 28, 2026 16:14 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Verification lookup unavailable; legacy status shown — Last attempted Oct 3, 2026 16:06 UTC
Availability has not been rechecked; current availability is unknown.
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