| Functional item | ESC filter 5 kV board assembly A high-voltage filtering board associated with electrostatic chuck power hardware. |
|---|---|
| Associated board | ESC 5 kV power supply board reference 810-190402-001 Provided evidence associates this filter board with a related ESC power supply board. |
| Observed revision | Rev. A The provided evidence identifies Rev. A; verify required revision. |
| Voltage class | 5 kV A high-voltage ESC supply/filter context; exact rating should be verified on the board label or drawing. |
|---|
An ESC filter board conditions or filters high-voltage power used by an electrostatic chuck system.
Filtering helps manage electrical noise, ripple, and transient behavior in high-voltage chuck power circuits.
A PCB populated with components designed for high-voltage filtering and insulation clearances.
Tracking, contamination, cracked capacitors, and insulation damage can cause arcing or chuck faults.
High-voltage power used to create electrostatic clamping force between wafer and chuck.
Stable ESC power is important for wafer clamping, thermal contact, and process repeatability.
Filtering circuitry used to reduce noise or transients in high-voltage power lines.
Incorrect filtering can cause electrical faults or unstable chuck behavior.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
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| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Dec 27, 2022 12:26 UTC | LAM Research 810-190430-001 Rev.A ESC Filter 5kV Board Assembly | Completed listing price | 62.99 (currency not captured) | Not established |
| Sep 16, 2019 18:26 UTC | LAM Research 810-190430-001 Rev.A ESC Filter 5kV Board Assembly | Completed listing price | 69.99 (currency not captured) | Not established |
| May 19, 2016 23:52 UTC | Lam Research ESC 5KV Power Supply 810-190402-001 & Filter Board 810-190430-001 | Completed listing price | 399.95 (currency not captured) | Not established |
| Apr 25, 2016 19:54 UTC | Lam Research ESC 5KV Power Supply 810-190402-001 & Filter Board 810-190430-001 | Completed listing price | 399.95 (currency not captured) | Not established |
| Mar 26, 2016 12:02 UTC | Lam Research ESC 5KV Power Supply 810-190402-001 & Filter Board 810-190430-001 | Completed listing price | 399.95 (currency not captured) | Not established |
| Feb 25, 2016 03:50 UTC | Lam Research ESC 5KV Power Supply 810-190402-001 & Filter Board 810-190430-001 | Completed listing price | 399.95 (currency not captured) | Not established |
| Jan 15, 2016 11:08 UTC | Lam Research ESC 5KV Power Supply 810-190402-001 & Filter Board 810-190430-001 | Completed listing price | 399.95 (currency not captured) | Not established |
| Dec 12, 2015 20:31 UTC | Lam Research ESC 5KV Power Supply 810-190402-001 & Filter Board 810-190430-001 | Completed listing price | 399.95 (currency not captured) | Not established |
| Nov 12, 2015 04:06 UTC | Lam Research ESC 5KV Power Supply 810-190402-001 & Filter Board 810-190430-001 | Completed listing price | 399.95 (currency not captured) | Not established |
| Oct 12, 2015 01:43 UTC | Lam Research ESC 5KV Power Supply 810-190402-001 & Filter Board 810-190430-001 | Completed listing price | 399.95 (currency not captured) | Not established |
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Legacy record; no enhanced status check captured
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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