| Subsystem | BICEP ESC power supply Associated with electrostatic chuck power circuitry. |
|---|---|
| Filtering context | Heater filter and ESC filter Filtering is referenced with the power supply assembly. |
| Revision examples | Rev B / Rev E / Rev G referenced Revision varies across examples and must be matched to the tool. |
A power supply or power-supply PCB associated with an electrostatic chuck circuit.
ESC power supplies provide controlled high-voltage bias used to clamp wafers during plasma processing; incorrect revisions can affect chucking or safety interlocks.
Power electronics board or module with high-voltage and filtering components.
Electrostatic chucking uses an electric field to hold a wafer against a chuck or pedestal.
Heater and ESC filters reduce electrical noise and protect downstream circuits.
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| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Mar 1, 2024 13:07 UTC | 810-495659-304 / BICEP ESC POWER SUPPLY W\ HEATER FILTER AND ESC FILTER BICEP II | Completed listing price | 1908.03 (currency not captured) | Not established |
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