Product description
PCB assembly / power supply board for ESC Bicep II DC-Probe, Lam Research 810-495659-307.
Specifications and identifiers
board details
| Board function | ESC Bicep II power supply / DC-Probe Repeated evidence identifies it as a power-supply PCB for ESC Bicep II DC-Probe. |
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| Revisions seen | A, B, C, D, E, G, and R307 variants referenced Revision must be matched to the tool. |
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Applications
heater controllamp power deliveryelectrostatic chuck powerRF/plasma support electronicselectrostatic chuck power/control supportLam Research tool power supply board replacement
How it works
A power supply, SCR controller, lamp driver, or ESC power board provides controlled electrical power to a load such as a heater, lamp, electrostatic chuck, or subsystem.
Voltage, power rating, output type, revision, and vendor model must match the tool configuration to avoid damaging equipment.
Technical guide
SCR
Silicon-controlled rectifier power control, commonly used for phase-angle heater or lamp control.
- PWR SPLY
- Power supply.
- VAC
- Volts AC.
What to verify before purchase
- Verify board revision, BICEP/ESC/DC-Probe configuration, connectors, and firmware or calibration requirements.
- Confirm whether the needed item is a board-only assembly or a broader module.
Confirm with the seller
- Exact tool configuration compatibility is not confirmed beyond the evidence provided.
- Current functional condition is not established by part identity alone.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.