832-038915-103 / RF MATCH NETWORK POLY ETCH AUTO TUNER / LAM RESEARCH 38127 LAM RESEARCH RF MATCH, BIAS 832-038915-103832-038915-103 / RF MATCH NETWORK POLY ETCH AUTO TUNER / LAM RESEARCH 832-038915-103 / RF MATCH NETWORK POLY ETCH AUTO TUNER / LAM RESEARCH Lam Research 832-038915-103 13.56MHz RF Match Network Poly Etch Autotuner As-Is832-038915-103 / RF MATCH NETWORK POLY ETCH AUTO TUNER / LAM RESEARCH 166-0201// LAM RESEARCH 832-038915-103 RF MATCH NETWORK [NOT WORKING]166-0201// LAM RESEARCH 832-038915-103 RF MATCH NETWORK [ASIS]LAM RESEARCH 832-038915-103 RF MATCH NETWORK832-038915-103 / RF MATCH NETWORK POLY ETCH AUTO TUNER / LAM832-038915-103 / RF MATCH NETWORK POLY ETCH AUTO TUNER / LAMLAM 832-038915-103 P/N 832-038915-103Lam RF Match Network Poly Etch Auto Tuner, 832-038915-103
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LAM RESEARCH 832-038915-103

Bias RF Match Network / Auto Tuner

Market Availability & Pricing

Part number832-038915-103
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales1025 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Matching Networks
Bias RF Match Network / Auto Tuner
LAM RESEARCH832-038915-103RF match network
Product description
RF match network, bias, poly etch auto tuner.
Specifications and identifiers
rf match
FunctionBias RF match network
Process contextPoly etch
Tuning contextAuto tuner
Applications
Poly etch chambersBias RF deliveryAuto-tuned RF matchingRF match replacementRF delivery troubleshooting
How it works

An RF match network tunes impedance between an RF generator and chamber/plasma load.

Bias match networks are frequency-, power-, and chamber-specific; mismatches can cause reflected power and process faults.

What to verify before purchase
  • Confirm frequency and power rating.
  • Verify tuner motor/control compatibility and condition.
Confirm with the seller
  • Exact tool compatibility beyond the referenced family/context is not confirmed.
  • Revision-specific substitutions are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

832-038915-103 / RF MATCH NETWORK POLY ETCH AUTO TUNER / LAM RESEARCH

832-038915-103 / RF MATCH NETWORK POLY ETCH AUTO TUNER / LAM RESEARCH

USD 1800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 1, 2026 21:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
38127 LAM RESEARCH RF MATCH, BIAS 832-038915-103

38127 LAM RESEARCH RF MATCH, BIAS 832-038915-103

USD 4000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Oct 13, 2025 09:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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