839-011906-001 / ELECTRODE SHOWER HEAD / LAM RESEARCH CORPORATIONC3415 LAM RESEARCH ELECTRODE, SILICON, 6" (NEW) 839-011906-001839-011906-001 / ELECTRODE SHOWER HEAD / LAM RESEARCH CORPORATION839-011906-001 / ELECTRODE SHOWER HEAD / LAM RESEARCH CORPORATION839-011906-001 / ELECTRODE SHOWER HEAD / LAM RESEARCH CORPORATION839-011906-001 / ELECTRODE SHOWER HEAD / LAM RESEARCH CORPORATIONLAM Research 839-011906-001, ELECTRODE SILICON 6 INCH, New 2nd sourceLam Research LAM 839-011906-001 ELECTRODE SILICON 6Lam Research 6" SILICON ELECTRODE, 839-011906-001, NOSLAM 839-011906-001 LAM ELECTRODE, SILICON, 6"839-011906-001 /ELECTRODE SILICON / LAMLam Research 6" Upper Electrode 839-011906-001 P-Type Silicon Electrode AssemblyLAM 839-011906-001
Image 1 of 13

LAM RESEARCH 839-011906-001

6 Inch Silicon Electrode Showerhead

Market Availability & Pricing

Part number839-011906-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales3600 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Gas Distribution
6 Inch Silicon Electrode Showerhead
LAM RESEARCH839-011906-001Silicon electrode showerhead
Product description
Lam Research 839-011906-001 6 inch silicon upper electrode / electrode showerhead assembly, described as P-type silicon in related descriptions.
Specifications and identifiers
identification
Description6 inch silicon electrode / showerhead
MaterialSilicon; P-type silicon
PositionUpper electrode
Applications
PVD/CVD chamber kitsESC/focus ring stacksprocess-facing consumablesPlasma chamber upper electrode replacementGas distribution through electrode/showerhead6 inch Lam process chamber consumable
How it works

A process-facing ring, plate, or insulator used near the wafer, chuck, or chamber opening.

Geometry, material, coating, cleanliness, and revision affect fit, contamination control, plasma behavior, and wafer handling.

Technical guide
silicon

semiconductor material used for plasma-facing electrodes in some etch tools

showerhead
gas distribution feature with holes/orifices
What to verify before purchase
  • Verify silicon type/resistivity and hole pattern
  • Inspect for chips, cracks, deposits, and erosion
  • Confirm chamber compatibility and part revision
Confirm with the seller
  • Exact Lam chamber model is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

839-011906-001 / ELECTRODE SHOWER HEAD / LAM RESEARCH CORPORATION

839-011906-001 / ELECTRODE SHOWER HEAD / LAM RESEARCH CORPORATION

USD 2009.0400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 2, 2026 23:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
C3415 LAM RESEARCH ELECTRODE, SILICON, 6" (NEW) 839-011906-001

C3415 LAM RESEARCH ELECTRODE, SILICON, 6" (NEW) 839-011906-001

USD 2500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: NEW
Listed: Mar 7, 2024 05:01 UTC
End recorded: Dec 6, 2024 22:59 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.