10639 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE 839-017892-00512399 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE (PARTS) 839-017892-00512399 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE (PARTS) 839-017892-00512399 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE (PARTS) 839-017892-00512399 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE (PARTS) 839-017892-005LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE (PARTS) 839-017892-00510639 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE 839-017892-00512399 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE (PARTS) 839-017892-005Lam Research 839-017892-005 High Risk AL ChamberLAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE 839-017892-005
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LAM RESEARCH 839-017892-005

300mm Etch Thermal Control Plate

Market Availability & Pricing

Part number839-017892-005
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales1800 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Thermal Management › Heaters & Thermal Plates
300mm Etch Thermal Control Plate
LAM RESEARCH839-017892-005Thermal control plate
Product description
300 mm etch thermal control plate for Lam Research equipment.
Specifications and identifiers
identified features
Functionthermal control plate
Application300 mm etch
Material/contextaluminum chamber context appears in one source
Applications
heater assembliesthermal control platesheated vessels and chiller interfacesEtch chamber thermal control300 mm chamber hardware
How it works

A heater, thermal plate, or cooling/heater vessel manages process or subsystem temperature.

Thermal components must match tool geometry and temperature-control requirements.

What to verify before purchase
  • Verify whether this is the thermal control plate only or a larger chamber assembly.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

12399 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE (PARTS) 839-017892-005

12399 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE (PARTS) 839-017892-005

USD 2775.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 20, 2025 03:08 UTC
Estimated remaining at check: 3
Estimated sold at check: 1

eBay response captured — Checked Oct 12, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
10639 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE 839-017892-005

10639 LAM RESEARCH 300MM ETCH THERMAL CONTROL PLATE 839-017892-005

USD 5548.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 20, 2025 03:08 UTC
Estimated remaining at check: 7
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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