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LAM RESEARCH 839-018098-001

ESC Chuck Wafer Shadow Ring

Market Availability & Pricing

Part number839-018098-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Ceramic & Quartz Parts
ESC Chuck Wafer Shadow Ring
LAM RESEARCH839-018098-001Shadow ring
Product description
13 inch ID ESC chuck wafer shadow ring
Specifications and identifiers
observed
Description13 inch ID ESC chuck wafer shadow ring
Supported by provided listing title evidence.
Feature/context13 inch ID
Dimension/context appears in evidence; verify against drawing.
ESC contextESC chuck wafer ring
Evidence places the ring around ESC chuck/wafer hardware.
Equipment context
  • Lam Research ESC chuck/chamber hardware
Applications
ESC chuck ring hardwareWafer edge/focus/guard/shadow functionsLam Research chamber consumablesESC chuck ring replacementWafer edge/process-area chamber hardware
How it works

An ESC chuck wafer ring is a process-area ring used around an electrostatic chuck to manage wafer edge, focus, guarding, shadowing, or insulation functions.

These parts are fit- and material-sensitive; small ID, material, coating, or revision differences can affect process results and hardware clearance.

Technical guide
ESC

Electrostatic chuck; holds the wafer during processing.

ID
Inside diameter.
What to verify before purchase
  • Confirm ID/OD, thickness, material, coating, and revision.
  • Inspect for chips, cracks, erosion, or contamination.
  • Verify exact Lam chamber/tool compatibility.
Confirm with the seller
  • Exact tool/chamber model
  • Full dimensional drawing
  • Coating/surface treatment

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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