Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377Lam Research 300mm ESC Electrostatic Chuck TUNABLE,COUL,CNTR RF 839-019090-377
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LAM RESEARCH 839-019090-377

300 mm tunable center RF electrostatic chuck

Market Availability & Pricing

Part number839-019090-377
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales64.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Wafer Handling › Electrostatic Chucks
300 mm tunable center RF electrostatic chuck
LAM RESEARCH839-019090-377Electrostatic chuck
Product description
Lam Research 300 mm ESC electrostatic chuck, tunable/coulomb/center RF context, part 839-019090-377.
Specifications and identifiers
evidence
Item type300mm ESC Electrostatic Chuck
The single source gives a clear identity.
RF contextTUNABLE, COUL, CNTR RF
Indicates tunable/coulomb/center RF context, but exact configuration should be verified.
Applications
Etch chambersWafer clampingRF plasma process modules300 mm wafer clampingRF-coupled ESC replacement
How it works

An electrostatic chuck uses high voltage to clamp a wafer during plasma processing.

ESCs are highly tool-specific; material condition, electrode configuration, and cooling/RF interfaces are critical.

What to verify before purchase
  • Verify serial/revision and surface condition
  • Check cooling channels, RF contacts, and dielectric condition
Confirm with the seller
  • Exact Lam chamber/platform compatibility
  • Electrical specifications

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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