LAM 839-020965-005 Assembly, Outer, .18 Step, 300M839-020965-005 /OUTER SILICON ELECTRODE ASSEMBLY REV A / LAMNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW Lam Research 839-020965-005 Industrial 11-3/4"ID ESC Chuck Wafer Edge RingNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor Part5828 LAM RESEARCH OUTER SILICON ELECTRODE (NEW) 839-020965-005839-020965-005 /OUTER SILICON ELECTRODE ASSEMBLY REV A / LAMNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartLAM 839-020965-005 Assembly, Outer, .18 Step, 300MNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartLAM 839-020965-005 Assembly, Outer, .18 Step, 300MNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartLAM RESEARCH (LAM) 839-020965-005 Assembly, Outer, .18 Step, 300MNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartNEW SEALED Lam Research 839-020965-005 300MM Electrode Outer Semiconductor PartLAM Research (LAM) 839-020965-005 Assembly, Outer, .18 Step, 300M
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LAM RESEARCH 839-020965-005

300mm Outer Silicon Electrode Assembly

Market Availability & Pricing

Part number839-020965-005
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales450 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Chamber Components › Electrodes & Rings
300mm Outer Silicon Electrode Assembly
LAM RESEARCH839-020965-005Outer silicon electrode assembly
Product description
Outer silicon electrode assembly / ESC chuck wafer edge ring, 300mm context
Specifications and identifiers
observed
DescriptionOuter silicon electrode assembly
Supported by multiple titles.
Alternative wordingESC chuck wafer edge ring
One title uses wafer edge ring context.
Size/context300mm; 11-3/4 inch ID appears
Dimensions should be verified.
Step detail0.18 step appears
Exact geometry should be checked.
Equipment context
  • Lam Research 300mm process equipment
Applications
300mm chamber hardwareESC/chuck edge hardwareLam process chamber electrodesOuter electrode replacementWafer edge ring/chamber hardware spare
How it works

A silicon electrode or edge ring is a process-exposed chamber component near the wafer/chuck area.

Material purity, dimensions, step geometry, and surface condition are critical for plasma/process compatibility.

What to verify before purchase
  • Verify material, dimensions, ID, and step geometry.
  • Confirm revision and chamber compatibility.
  • Inspect for chips, cracks, erosion, or contamination.
  • Confirm whether sealed/new/used.
Confirm with the seller
  • Exact Lam chamber model
  • Coating/surface treatment
  • Interchangeability with similar rings

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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