LAM 839-020965-006 ASSY, ELECTD OUTER 14 STEPLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 Rev. B, Outer Silicon Electrode AssemblyLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-020965-006 12-14"ID ESC Chuck Wafer Focus/Guard RingLAM 839-020965-006 ASSY, ELECTD OUTER 14 STEPLAM 839-020965-006 ASSY, ELECTD OUTER 14 STEPLAM RESEARCH (LAM) 839-020965-006 ASSY, ELECTD OUTER 14 STEPLam Research 839-020965-006 Assy Semi Conductor Part
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LAM RESEARCH 839-020965-006

Outer Silicon Electrode Assembly

Market Availability & Pricing

Part number839-020965-006
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Ceramic & Quartz Parts
Outer Silicon Electrode Assembly
LAM RESEARCH839-020965-006Outer electrode assembly
Product description
Outer silicon electrode assembly, 14-step / ESC focus or guard ring context
Specifications and identifiers
supported identifiers
DescriptionOuter silicon electrode assembly
Supported by electrode and ESC/focus/guard ring wording.
Geometry14 step; 12-14 in. ID noted
Geometry/dimension wording appears; verify actual dimensions.
Applications
Lam plasma chamber consumablesESC surrounding hardwareFocus/guard ring serviceLam plasma chamber consumablesESC surrounding hardwareFocus/guard ring service
How it works

An outer electrode or guard/focus ring sits around wafer-processing regions to help shape plasma or electrical fields.

Correct geometry and material are important for plasma uniformity, wafer edge control, and ESC/chuck compatibility.

What to verify before purchase
  • Confirm revision, inner/outer diameter, step geometry, material, and whether it is an electrode, focus ring, or guard ring in the target assembly.
Confirm with the seller
  • Exact chamber model and whether the item is supplied as a ring only or full assembly are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM 839-020965-006 ASSY, ELECTD OUTER 14 STEP

LAM 839-020965-006 ASSY, ELECTD OUTER 14 STEP

USD 1991.95

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Aug 17, 2020 06:48 UTC
End recorded: Dec 7, 2024 12:53 UTC
Estimated remaining at check: 20
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:07 UTC

Availability has not been rechecked; current availability is unknown.

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