Lam Research 839-021113-002 Silicon Electrode OEM RefurbishedLAM Research 839-021113-002 Plate *new surplus LAM Research 839-021113-002 LAM ASSY, ELCTD, INNER, TC, 300MLam Research 839-021113-002 Silicon Electrode RefurbishedLAM RESEARCH 839-021113-002 ELECTRODELAM RESEARCH 510-783-5050 PEN-TEC OEM 839-021113-002 INNER ELECTRODELam Research 300mm, TC, Inner Electrode, 839-021113-0025824 LAM RESEARCH INNER ELECTRODE 839-021113-002Lam Research 839-021113-002 Silicon Electrode cleaned used working OEM Part LAM RESEARCH (LAM) 839-021113-002 ASSY, ELCTD, INNER, TC, 300MOEM Part LAM RESEARCH (LAM) 839-021113-002 ASSY, ELCTD, INNER, TC, 300MLam Research 839-021113-002 ELCTD Electrode Inner Assembly Semiconductor PartLam Research 839-021113-002 ELCTD Electrode Inner Assembly Semiconductor PartLam Research 839-021113-002 ELCTD Electrode Inner Assembly Semiconductor PartLam Research 839-021113-002 ELCTD Electrode Inner Assembly Semiconductor PartLAM RESEARCH (LAM) 839-021113-002 LAM ASSY, ELCTD, INNER, TC, 300MLam Research 839-021113-002 Silicon TC 300mm Inner Electrode Assembly
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LAM RESEARCH 839-021113-002

300mm TC Inner Electrode Assembly

Market Availability & Pricing

Part number839-021113-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales124.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Electrodes
300mm TC Inner Electrode Assembly
LAM RESEARCH839-021113-002inner electrode assembly
Product description
Inner electrode assembly, TC, 300 mm, silicon electrode context where applicable
Specifications and identifiers
supported details
Item typeInner electrode assembly
Chamber electrode component/assembly.
Size context300 mm
Associated with 300 mm tool/chamber context.
Material/contextSilicon electrode noted
Silicon appears in evidence; verify actual material/condition.
TC / TCCT contextTC / TCCT descriptors
Preserved as supported descriptors; exact tool expansion not confirmed.
Equipment context
  • Lam 300 mm TC/TCCT chamber context
Applications
plasma etch chambersLam chamber consumable assemblies300 mm process hardwareinner electrode replacementplasma chamber consumable service300 mm chamber maintenance
How it works

An electrode assembly installed inside a plasma processing chamber.

Electrodes influence plasma coupling and chamber performance; geometry, material, condition, and matching tool generation are critical.

Technical guide
Silicon

Common plasma-facing electrode material in some etch chamber designs.

ELCTD
Electrode
TC
Tool/chamber descriptor from evidence; exact expansion not confirmed
What to verify before purchase
  • Verify material and refurb/new condition
  • Match electrode revision and chamber configuration
  • Confirm all included hardware/assembly components
Confirm with the seller
  • Exact Lam chamber platform
  • RF matching/compatibility specifics

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research 839-021113-002 Silicon Electrode OEM Refurbished

Lam Research 839-021113-002 Silicon Electrode OEM Refurbished

USD 1006.1800

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 28, 2025 19:29 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

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