LAM RESEARCH 715-013639-009 Chamber Ring w/ LAM 839-044157-031 Sil Elec AssyLAM RESEARCH (LAM) 715-013639-009 Chamber Ring LAM RESEARCH 839-044157-031 SilicLAM 715-013639-009 Chamber Ring LAM RESEARCH 839-044157-031 Silicon Electrode AsLAM RESEARCH (LAM) 715-013639-009 Chamber Ring LAM RESEARCH 839-044157-031 SilicLam 839-044157-031 Silicon Electrode Assembly LAM 715-013639-009 Chamber Ring LAM RESEARCH 839-044157-031 Silicon Electrode AsLAM 715-013639-009 Chamber Ring LAM RESEARCH 839-044157-031 Silicon Electrode AsLAM 715-013639-009 Chamber Ring LAM RESEARCH 839-044157-031 Silicon Electrode AsLam Research 839-044157-031 AssemblyLAM RESEARCH (LAM) 715-013639-009 Chamber Ring LAM RESEARCH 839-044157-031 SiLAM Research 839-044157-031 Silicon Electrode Assembly Assy NEW NIBNEW Lam Research 839-044157-031 Assy Assembly NIB839-044157-031 SILICON ELECTRODE ASSEMBLY / LAM RESEARCH -USED 839-021113-002-H
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LAM RESEARCH 839-044157-031

Silicon Electrode Assembly

Market Availability & Pricing

Part number839-044157-031
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales199.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Silicon Electrodes
Silicon Electrode Assembly
LAM RESEARCH839-044157-031Silicon electrode assembly
Product description
Lam Research silicon electrode assembly, sometimes referenced with chamber ring 715-013639-009.
Specifications and identifiers
identification
Component typeSilicon electrode assembly
Silicon process electrode or electrode assembly.
Associated component715-013639-009 chamber ring
A chamber ring is sometimes bundled or referenced with this assembly.
Material referenceSilicon
Material is explicitly identified in descriptions.
Applications
Plasma etch chamber consumablesLam chamber electrode assembliesProcess kit hardwareRF/plasma couplingEtch chamber process consumableSilicon electrode replacement
How it works

A silicon electrode assembly used as a replaceable semiconductor-equipment or industrial-tool component.

Correct identification matters because fit, connector style, calibration, cleanliness, and revision can determine whether the part will install and operate correctly.

Technical guide
silicon

Common electrode material in plasma etch chambers where compatibility with silicon processes and plasma exposure matters.

plasma_electrode

Electrodes shape plasma, RF coupling, or process gas/electric fields inside chambers.

electrode_assy
Assembly containing an electrode and possibly mounting/support components.
What to verify before purchase
  • Exact chamber/ring pairing
  • Material grade and condition
  • Revision and coating/cleanliness
Confirm with the seller
  • Exact tool configuration beyond supported references
  • Current operational condition

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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