Lam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 12-1/4"ID ESC Chuck Wafer Focus/Guard RingLam Research 839-052158-020 Assembly Semiconductor PartLam Research 839-052158-020 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LAM RESEARCH 839-052158-020

ESC Chuck Focus/Guard Ring

Market Availability & Pricing

Part number839-052158-020
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales52.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
ESC Chuck Focus/Guard Ring
LAM RESEARCH839-052158-020Focus/guard ring
Product description
12-1/4 inch ID ESC chuck wafer focus/guard ring
Specifications and identifiers
observed
Description12-1/4 inch ID ESC chuck wafer focus/guard ring
Supported by provided listing title evidence.
Feature/context12-1/4 inch ID
Dimension/context appears in evidence; verify against drawing.
ESC contextESC chuck wafer ring
Evidence places the ring around ESC chuck/wafer hardware.
Equipment context
  • Lam Research ESC chuck/chamber hardware
Applications
ESC chuck ring hardwareWafer edge/focus/guard/shadow functionsLam Research chamber consumablesESC chuck ring replacementWafer edge/process-area chamber hardware
How it works

An ESC chuck wafer ring is a process-area ring used around an electrostatic chuck to manage wafer edge, focus, guarding, shadowing, or insulation functions.

These parts are fit- and material-sensitive; small ID, material, coating, or revision differences can affect process results and hardware clearance.

Technical guide
ESC

Electrostatic chuck; holds the wafer during processing.

ID
Inside diameter.
What to verify before purchase
  • Confirm ID/OD, thickness, material, coating, and revision.
  • Inspect for chips, cracks, erosion, or contamination.
  • Verify exact Lam chamber/tool compatibility.
Confirm with the seller
  • Exact tool/chamber model
  • Full dimensional drawing
  • Coating/surface treatment

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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