Lam Research ESC,DZ,BTM-MTD FLEX HX(ARCING) 839-102001-069  (As-Is)Lam Research 839-102001-069 OXIDE HX+ ESC Chuck 839-102001-069 CleanLam Research 839-102001-069 OXIDE HX+ ESC Chuck 839-102001-069Lam Research 839-102001-069 OXIDE HX+ ESC Chuck 839-102001-069 CleanLam Research 839-102001-069 OXIDE HX+ ESC Chuck 839-102001-069Lam Research OXIDE HX+ ESC Chuck 839-102001-069Lam Research 839-102001-069 OXIDE HX+ ESC Chuck 839-102001-069Lam Research OXIDE HX+ ESC Chuck 839-102001-069Lam Research 839-102001-069 ESC Chuck OXIDE HX+ 839-102001-069Lam Research ESC,DZ,BTM-MTD 839-102001-069
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LAM RESEARCH 839-102001-069

Oxide HX+ ESC Chuck

Market Availability & Pricing

Part number839-102001-069
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales13500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chucks & Pedestals › Electrostatic Chucks
Oxide HX+ ESC Chuck
LAM RESEARCH839-102001-069electrostatic chuck
Product description
Lam Research electrostatic chuck described as OXIDE HX+ ESC, dual-zone bottom-mounted/flex context.
Specifications and identifiers
esc details
Chuck typeESC chuck
Electrostatic chuck.
Process/contextOxide HX+
Configuration termsDZ, BTM-MTD, FLEX HX
Likely dual-zone/bottom-mounted/flex heat-exchanger context; verify labels.
Applications
etch chambersoxide etchelectrode assemblieswafer temperature controloxide etch wafer clampingwafer thermal controlLam process module chuck assembly
How it works

An electrostatic chuck or chuck-related component used to hold and thermally manage a wafer during processing.

Wafer size, clamp voltage design, helium backside cooling, heater/chuck style, and chamber revision are critical compatibility factors.

What to verify before purchase
  • Confirm wafer size, exact revision, condition, and whether arcing/damage is present.
  • Verify DZ/BTM-MTD/FLEX HX markings and compatibility with the installed Lam chamber.
Confirm with the seller
  • Exact Lam platform and revision compatibility are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research ESC,DZ,BTM-MTD FLEX HX(ARCING) 839-102001-069  (As-Is)

Lam Research ESC,DZ,BTM-MTD FLEX HX(ARCING) 839-102001-069 (As-Is)

USD 9600.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Oct 10, 2024 05:02 UTC
End recorded: Dec 6, 2024 20:45 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

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