Product description
Lam Research cover assembly, described as ASSY CVR ESC RB OXD / cover assembly Rev B.
Specifications and identifiers
Function
| Likely role | Protective or process-area cover associated with an electrostatic chuck configuration |
|---|
Identity
| Supported item noun | Cover assembly |
|---|
| ESC context | ESC RB OXD |
|---|
| Revision reference | Rev B appears in one description |
|---|
Applications
PVD/CVD/etch process chamberschamber rebuildsconsumable kitstool refurbishmentESC area cover replacementetch chamber process kit serviceLam Research chamber maintenance
How it works
A mechanical chamber or process-area component used near the wafer, plasma, gas flow, or vacuum boundary of a semiconductor tool.
Geometry, coating, material, and revision can affect process uniformity, particle control, sealing, and compatibility with nearby assemblies.
What to verify before purchase
- Decode RB/OXD context against the target chamber
- Confirm revision and material before use
Confirm with the seller
- Exact platform and dimensions
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.