839-140210-001 / ASSY CVR ESC RB OXD / LAM RESEARCH CORPORATIONLam Research Cover Assembly REV B PN: 839-140210-001Lam Research (LAM) 839-140210-001 ASSY CVR ESC RB OXD839-140210-001 / ASSY CVR ESC RB OXD / LAM RESEARCH CORPORATION839-140210-001 / ASSY CVR ESC RB OXD / LAM RESEARCH CORPORATION839-140210-001 / ASSY CVR ESC RB OXD / LAM RESEARCH CORPORATION839-140210-001 / ASSY CVR ESC RB OXD / LAM RESEARCH CORPORATIONLam Research Cover Assembly REV B PN: 839-140210-001Lam Research Cover Assembly REV B PN: 839-140210-001LAM 839-140210-001 ASSY CVR ESC RB OXDLAM RESEARCH (LAM) 839-140210-001    ASSY CVR ESC RB OXD839-140210-001 / ASSY CVR ESC RB OXD / LAM RESEARCH CORPORATION
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LAM RESEARCH 839-140210-001

ESC Cover Assembly

Market Availability & Pricing

Part number839-140210-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2064.83 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › ESC Covers
ESC Cover Assembly
LAM RESEARCH839-140210-001ESC cover assembly
Product description
Lam Research cover assembly, described as ASSY CVR ESC RB OXD / cover assembly Rev B.
Specifications and identifiers
Function
Likely roleProtective or process-area cover associated with an electrostatic chuck configuration
Identity
Supported item nounCover assembly
ESC contextESC RB OXD
Revision referenceRev B appears in one description
Applications
PVD/CVD/etch process chamberschamber rebuildsconsumable kitstool refurbishmentESC area cover replacementetch chamber process kit serviceLam Research chamber maintenance
How it works

A mechanical chamber or process-area component used near the wafer, plasma, gas flow, or vacuum boundary of a semiconductor tool.

Geometry, coating, material, and revision can affect process uniformity, particle control, sealing, and compatibility with nearby assemblies.

What to verify before purchase
  • Decode RB/OXD context against the target chamber
  • Confirm revision and material before use
Confirm with the seller
  • Exact platform and dimensions

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

839-140210-001 / ASSY CVR ESC RB OXD / LAM RESEARCH CORPORATION

839-140210-001 / ASSY CVR ESC RB OXD / LAM RESEARCH CORPORATION

USD 1899.6400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 23, 2026 22:25 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research Cover Assembly REV B PN: 839-140210-001

Lam Research Cover Assembly REV B PN: 839-140210-001

USD 150.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 7, 2023 18:01 UTC
End recorded: Dec 6, 2024 21:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research (LAM) 839-140210-001 ASSY CVR ESC RB OXD

Lam Research (LAM) 839-140210-001 ASSY CVR ESC RB OXD

USD 22.95

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Aug 17, 2020 06:49 UTC
End recorded: Dec 7, 2024 12:50 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

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