LAM RESEARCH Assy, Kappe, Elektrode, Esc 8 ", Semi 839-440462-508LAM RESEARCH ASSY, CAP, ELECTRODE, ESC 8", SEMI (PARTS) 839-440462-50825353 LAM RESEARCH ASSY, CAP, ELECTRODE, ESC 8", SEMI (PARTS) 839-440462-508ESC-163, 839-440462-508 / REFURBISHED, ESC-163 LAM508 ESC, 440462 / LAM RESEARCH839-440462-508, LAM RESEARCH ASSY, CAP, ELECTRODE, ESC 8"15624 LAM RESEARCH ASSY,CAP,ELECTRODE,ESC 8",SEMI 839-440462-50815624 LAM RESEARCH ASSY,CAP,ELECTRODE,ESC 8",SEMI 839-440462-508LAM RESEARCH ASSY,CAP,ELECTRODE,ESC 8",SEMI 839-440462-50815624 LAM RESEARCH ASSY,CAP,ELECTRODE,ESC 8",SEMI 839-440462-508Lam Research p/n 839-440462-508 ASSY,CAP,ELECTRODE,ESC 8"Lam Research p/n 839-440462-508 ASSY,CAP,ELECTRODE,ESC 8"Lam Research p/n 839-440462-508 ASSY,CAP,ELECTRODE,ESC 8"Lam Research 839-440462-508 ASSY, CAP, ELCTD, ESC, 8'', SEMILAM 839-440462-508 Cap Electrode ESCLAM 839-440462-508 Cap Electrode ESCLAM 839-440462-508 Cap Electrode ESCLAM 839-440462-508 E Cap Electrode ESCLAM 839-440462-508 E Cap Electrode ESCLAM 839-440462-508 Cap Electrode ESC
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LAM RESEARCH 839-440462-508

8 in ESC Cap Electrode Assembly

Market Availability & Pricing

Part number839-440462-508
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales12800.8 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › ESC & Electrode Components
8 in ESC Cap Electrode Assembly
LAM RESEARCH839-440462-508ESC cap electrode assembly
Product description
Cap/electrode assembly for an 8 inch ESC semiconductor chamber component
Specifications and identifiers
identification
ComponentCap electrode assembly
ESC context8 inch ESC
Wafer size context8 inch / 200 mm class
8 inch is commonly equivalent to 200 mm wafer class.
physical
Assembly roleElectrode cap / ESC-adjacent chamber component
Applications
etch chambersplasma process moduleselectrostatic chuck assembliesESC refurbishment or replacementplasma chamber electrode stack service8 inch wafer processing hardware
How it works

An ESC cap electrode assembly is a chamber component associated with an electrostatic chuck or electrode stack.

ESC/electrode components affect wafer clamping, RF/plasma behavior, thermal contact, and chamber process uniformity.

Technical guide
ESC

Electrostatic chuck; a chuck that uses electrostatic force to hold a wafer during processing.

electrode

A conductive chamber element used for RF or electrical coupling in plasma tools.

What to verify before purchase
  • Confirm revision and exact ESC/electrode configuration.
  • Verify coating, material, and surface condition.
  • Check whether the part is refurbished, used, or new and whether it includes associated hardware.
Confirm with the seller
  • Exact Lam chamber model is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM RESEARCH Assy, Kappe, Elektrode, Esc 8 ", Semi 839-440462-508

LAM RESEARCH Assy, Kappe, Elektrode, Esc 8 ", Semi 839-440462-508

USD 2899.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
IL
Condition: Used
Listed: Jul 18, 2024 15:02 UTC
End recorded: Dec 6, 2024 20:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH ASSY, CAP, ELECTRODE, ESC 8", SEMI (PARTS) 839-440462-508

LAM RESEARCH ASSY, CAP, ELECTRODE, ESC 8", SEMI (PARTS) 839-440462-508

USD 2608.6100

Observed public listing price, not an accepted sale amount.

Observed active at check time
DE
Condition: Used
Listed: Jul 28, 2023 10:30 UTC
End recorded: Dec 7, 2024 04:25 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
25353 LAM RESEARCH ASSY, CAP, ELECTRODE, ESC 8", SEMI (PARTS) 839-440462-508

25353 LAM RESEARCH ASSY, CAP, ELECTRODE, ESC 8", SEMI (PARTS) 839-440462-508

USD 2021.04

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Apr 20, 2021 02:37 UTC
End recorded: Dec 6, 2024 17:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:46 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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