839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH10630 LAM RESEARCH ETCH FLEX TALON ECT. LAM 2300 ESC 300MM PARTS 839-800327-31530699 LAM RESEARCH ETCH FLEX TALON ECT. LAM 2300 ESC 300MM 839-800327-315839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCHLAM RESEARCH 839-800327-315 G839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH30699 LAM RESEARCH ETCH FLEX TALON ECT. LAM 2300 ESC 300MM 839-800327-315LAM Research 839-800327-315 ESC 300mm CER BI IMB BIG PIN *used working10630 LAM RESEARCH ETCH FLEX TALON ECT LAM 2300 ESC 300MM 839-800327-315839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAMLAM Research 839-800327-315 Rev. F, 300mm ESC Electrostatic Chuck Electrode
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LAM RESEARCH 839-800327-315

Lam 2300 300 mm ESC assembly

Market Availability & Pricing

Part number839-800327-315
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales4200 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Electrostatic Chuck Components
Lam 2300 300 mm ESC assembly
LAM RESEARCH839-800327-315Electrostatic chuck
Product description
ETCH Flex Talon / Lam 2300 ESC 300 mm, electrostatic chuck/electrode assembly
Specifications and identifiers
identification
Supported item nounESC / electrostatic chuck electrode
Supported platform wordingLam 2300 / Talon etch
Wafer size300 mm
Revision wordingRev C / Rev F appears across sources
Equipment context
  • Lam 2300 / Talon etch
Applications
etch modulesLam 2300/Talon process tools300 mm wafer handling300 mm wafer clampingEtch process module serviceESC/electrode replacement
How it works

An electrostatic chuck uses electrostatic force to hold a wafer during processing.

ESC condition and exact configuration are critical for wafer clamping, thermal transfer, and process repeatability.

Technical guide
ESC
Electrostatic chuck.
Talon
Lam etch platform/family wording associated with this part.
What to verify before purchase
  • Confirm revision, coating/ceramic condition, and helium/vacuum ports
  • Verify exact Lam platform and chamber match
  • Test electrical isolation and chuck performance before installation
Confirm with the seller
  • Whether Rev C and Rev F interchange
  • Complete material stack

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH

839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH

USD 3443.6200

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 8, 2026 08:53 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH

839-800327-315 / ETCH FLEX TALON ECT. LAM 2300 ESC 300MM REV C / LAM RESEARCH

USD 4099.5500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 8, 2026 23:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
10630 LAM RESEARCH ETCH FLEX TALON ECT. LAM 2300 ESC 300MM PARTS 839-800327-315

10630 LAM RESEARCH ETCH FLEX TALON ECT. LAM 2300 ESC 300MM PARTS 839-800327-315

USD 3341.3400

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 8, 2025 04:02 UTC
Estimated remaining at check: 7
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
30699 LAM RESEARCH ETCH FLEX TALON ECT. LAM 2300 ESC 300MM 839-800327-315

30699 LAM RESEARCH ETCH FLEX TALON ECT. LAM 2300 ESC 300MM 839-800327-315

USD 7000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 8, 2025 04:02 UTC
Estimated remaining at check: 5
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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