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LAM RESEARCH 839-800327-391

ESC Pedestal / Electrostatic Chuck

Market Availability & Pricing

Part number839-800327-391
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales399.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Wafer Handling & Chucks › Electrostatic Chucks
ESC Pedestal / Electrostatic Chuck
LAM RESEARCH839-800327-391electrostatic chuck pedestal
Product description
Electrostatic chuck / ESC pedestal, 195 mm notch, 8 inch / 200 mm DPS chamber context.
Specifications and identifiers
chuck details
Chuck typeESC / electrostatic chuck pedestal
A wafer support that uses electrostatic force to hold the wafer.
Wafer size context195 mm / 8 inch / 200 mm appears in evidence
Buyer should confirm exact supported wafer size and notch geometry.
Platform/process contextDPS chamber
Listed evidence repeatedly mentions DPS chamber context.
Equipment context
  • Applied Materials DPS chamber
Applications
Wafer clamping/support in plasma processingEtch chamber pedestal serviceWafer clamping/support in plasma processingEtch chamber pedestal service
How it works

A electrostatic chuck pedestal used as a service/replacement part in semiconductor or industrial equipment.

Correct identification matters because fit, revision, contamination history, and configuration can determine whether the part is usable in a tool.

Technical guide
polyimide_or_ceramic

ESCs may use dielectric layers; evidence mentions polyimide on one title but exact construction should be verified.

DPS
Applied Materials DPS chamber/process context appearing in evidence.
ESC
Electrostatic chuck.
What to verify before purchase
  • Verify exact revision, physical condition, and included accessories before purchase.
  • Confirm compatibility against the tool BOM or OEM part label.
Confirm with the seller
  • Exact OEM compatibility beyond the platforms or contexts appearing in listing evidence is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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