Lam research End Point Detection, 853-001983R005LAM RESEARCH CORPORATION 853-001983-005 DETECTOR DUAL END POINT ASSY X 2LAM RESEARCH 853-001983-005 / DETECTOR DUAL END POINT ASSY853-001983-005 / DETECTOR DUAL END POINT ASSY / LAM RESEARCH CORPORATIONLam Research End Point Detection PN: 853-001983-005 REV: TLam Research End Point Detection PN: 853-001983-005 REV: RLam research End Point Detection, 853-001983-005Lam research End Point Detection, 853-001983-0057821 LAM RESEARCH END POINT DETECTION, P/N:714-002602-001 (PARTS) 853-001983-005853-001983-005 Lam Research US Spot Inventory Fast Delivery NEW IN BOXLam Research Brand New 853-001983-005 Control Module US Stock Fast Free ShippingLAM RESEARCH ASSY CONTROLLER REV T 853-001983-0051PCS LAM RESEARCH 853-001983-005 1003418-11-21-0007 (3-month warranty/SHIP DHL)853-001983-005 / ASSY, END POINT DETECTOR DUAL / LAM RESEARCH CORPORATION853-001983-005 / ASSY, END POINT DETECTOR DUAL / LAM RESEARCH CORPORATION853-001983-005 / ASSY, END POINT DETECTOR DUAL / LAM RESEARCH CORPORATION 853-001983-005 / ASSY, END POINT DETECTOR DUAL / LAM853-001983-005 / ASSY, END POINT DETECTOR DUAL / LAMLam Research 490 / 590 Optical End Point DETECTOR 853-001983-005Lam Research 490 / 590 Optical End Point DETECTOR 853-001983-0057821 LAM RESEARCH END POINT DETECTION, P/N:714-002602-001 (PARTS 853-001983-005LAM RESEARCH 853-001983-005 End Point DetectionLAM RESEARCH 853-001983-005 End Point Detection8983 LAM RESEARCH END POINT DETECTION (714-002602-001) 853-001983-0058983 LAM RESEARCH END POINT DETECTION (714-002602-001) 853-001983-005LAM Research 853-001983-005 Rev. R ASSY ENDPT DET DUAL Detector V96360911 UsedLAM Research 853-001983-005 Rev. R ASSY ENDPT DET DUAL Detector V96360911 UsedLAM Research 853-001983-005 Rev. R ASSY ENDPT DET DUAL Detector V96360911 UsedLAM RESEARCH 853-001983-005 USPP 853001983005Lam Research End Point Detection, 853-001983-005, 520nm / 703nmLAM RESEARCH 853-001983-005 USPP 853001983005LAM Research 853-001983-005 Rev. R Endpoint DetectorLam Research EndPoint Detector 853-001983-005 Rev R 405nm/520nm CH12/13Lam Research EndPoint Detector 853-001983-005 Rev R 405nm/520nm CH12/13Lam Research EndPoint Detector 853-001983-005 Rev R 405nm/520nm CH12/13Lam Research EndPoint Detector 853-001983-005 Rev R 405nm/520nm CH12/13LAM RESEARCH 853-001983-005 NSFP 853001983005LAM 853-001983-005 ASSY, ENDPOINT DETECTOR CH WINDOW 9400Lam Research 4420 Endpoint Detector 853-001983-005-H-PCBELE Used WorkingLam Research Brand New 853-001983-005 Control Module US Stock Fast Free ShippingLam Research Brand New 853-001983-005 Control Module US Stock Fast Free Shipping
Image 1 of 41

LAM Research 853-001983-005

Dual Endpoint Detector Assembly

Market Availability & Pricing

ENDPOINT DETECTOR

Part number853-001983-005
ManufacturerLAM Research
Current availabilitySee listings below
Latest completed listing with reported sales224.63 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Optical › Metrology & Inspection › Endpoint Detection
Dual Endpoint Detector Assembly
LAM Research853-001983-005endpoint detector assembly
Product description
Assembly, Dual End Point Detector / Endpoint Detection Module
Specifications and identifiers
observed identity
FunctionDual endpoint detector
Many titles identify a dual endpoint detector or endpoint detection assembly.
Optical details405/520 nm and 520/703 nm mentioned
Wavelength pairs appear in some listings and should be verified against the exact revision.
Platform mentionsLam 490/590/4420/9400 contexts appear
Platform references vary and should be confirmed from tool BOM.
Applications
plasma etch endpoint monitoringLam Research optical endpoint systemsprocess control feedbackOptical endpoint detectionReplacement dual-filter detector assembly
How it works

An endpoint detector monitors optical signals from a process chamber to detect process completion or transitions.

Endpoint hardware must match optical channels, wavelengths, window/interface, and controller expectations.

Technical guide
optical endpoint

Uses optical emission or reflected light changes to infer process state.

ASSY
Assembly.
Endpoint
The detected process completion point.
P/N
Part number.
PCB
Printed circuit board.
Rev
Revision level; match for replacement.
nm
Nanometer wavelength unit.
What to verify before purchase
  • Match revision and optical wavelength/filter configuration.
  • Confirm platform and channel/window configuration.
  • Verify detector output and controller compatibility.
Confirm with the seller
  • Exact supported Lam platform
  • Exact wavelength set for every revision
  • Calibration state

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam research End Point Detection, 853-001983R005

Lam research End Point Detection, 853-001983R005

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 12, 2026 21:10 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH CORPORATION 853-001983-005 DETECTOR DUAL END POINT ASSY X 2

LAM RESEARCH CORPORATION 853-001983-005 DETECTOR DUAL END POINT ASSY X 2

USD 999.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
IL
Condition: Used
Listed: Jan 28, 2026 17:24 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
LAM RESEARCH 853-001983-005 / DETECTOR DUAL END POINT ASSY

LAM RESEARCH 853-001983-005 / DETECTOR DUAL END POINT ASSY

USD 875.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 9, 2025 20:39 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
853-001983-005 / DETECTOR DUAL END POINT ASSY / LAM RESEARCH CORPORATION

853-001983-005 / DETECTOR DUAL END POINT ASSY / LAM RESEARCH CORPORATION

USD 997.0300

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 3, 2025 15:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research End Point Detection PN: 853-001983-005 REV: T

Lam Research End Point Detection PN: 853-001983-005 REV: T

USD 1025.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 12, 2024 22:30 UTC
End recorded: Dec 7, 2024 12:11 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research End Point Detection PN: 853-001983-005 REV: R

Lam Research End Point Detection PN: 853-001983-005 REV: R

USD 1025.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 29, 2023 18:00 UTC
End recorded: Dec 7, 2024 09:58 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam research End Point Detection, 853-001983-005

Lam research End Point Detection, 853-001983-005

USD 1900.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Sep 9, 2023 04:30 UTC
End recorded: Dec 7, 2024 14:25 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam research End Point Detection, 853-001983-005

Lam research End Point Detection, 853-001983-005

USD 2233.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jul 5, 2023 06:00 UTC
End recorded: Dec 7, 2024 04:16 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
7821 LAM RESEARCH END POINT DETECTION, P/N:714-002602-001 (PARTS) 853-001983-005

7821 LAM RESEARCH END POINT DETECTION, P/N:714-002602-001 (PARTS) 853-001983-005

USD 869.4000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 15, 2023 03:00 UTC
End recorded: Dec 6, 2024 19:43 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.