Advanced Energy / LAM End Point Detector 853-001983-010LAM RESEARCH AUTO ETCHER DETECTOR 853-001983-010 490 590 690 790OEM Part LAM RESEARCH (LAM) 853-001983-010 END POINT Detector W/O Filters UNTESTAdvanced Energy / LAM End Point Detector 853-001983-010LAM Research 853-001983-010 Endpoint Detector 4420 Rev. T Used WorkingLam Research Endpoint Detector 853-001983-010 Rev. R Lam Research 853-001983-010 REV. R Endpoint Detector Lam Research 853-001983-010 REV. R Endpoint Detector Lam Research 853-001983-010 REV. R Endpoint Detector Lam Research 853-001983-010 REV. R Endpoint Detector Lam Research 853-001983-010 REV. R Endpoint Detector Lam Research 853-001983-010 REV. R Endpoint Detector Lam Research 853-001983-010 REV. R Endpoint Detector Lam Research 853-001983-010 REV. R Endpoint Detector
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LAM RESEARCH 853-001983-010

Endpoint Detector Assembly

Market Availability & Pricing

Part number853-001983-010
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales657.13 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Optical › Endpoint Detection › Optical Detectors
Endpoint Detector Assembly
LAM RESEARCH853-001983-010endpoint detector
Product description
Lam Research endpoint detector assembly, with wavelength/filter references including 490, 590, 690, and 790 nm in part references.
Specifications and identifiers
identification
Detector typeendpoint detector
Optical detector used for process endpoint monitoring.
Filter/wavelength context490 / 590 / 690 / 790 nm mentioned
May relate to optical filter channels; verify included filters and exact configuration.
Revision examplesRev. R / Rev. T
Multiple revision references appear.
Applications
etch endpoint detectionoptical emission spectroscopyplasma process monitoringetch endpoint detectionplasma optical monitoring
How it works

An optical endpoint detector or spectrometer-related module used to monitor process emissions or optical signals.

Endpoint detection helps determine when an etch or deposition process has reached a target condition.

Technical guide
CCD

Charge-coupled-device detector used in optical measurement systems.

OES

Optical emission spectroscopy monitors light emitted by plasma species.

endpoint
A process point at which a recipe step can stop or transition based on measured signal changes.
What to verify before purchase
  • Verify included filters, detector revision, wavelength set, and cable/interface compatibility.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

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