Product description
Assy, Voltage Detector, ESC, 2300; also listed generically as Sensor
Specifications and identifiers
sensor
| Device type | Voltage detector assembly Source titles identify voltage detector assembly |
|---|
| Subsystem clue | ESC Source titles identify electrostatic chuck context |
|---|
| Configuration clue | 2300 Source-provided code; exact meaning should be verified |
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| Generic wording | Sensor One listing describes it only as sensor |
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Applications
Electrostatic chuck monitoringHigh-voltage detectionTool safety/interlock circuitsESC voltage monitoringHigh-voltage sensor assemblyLam tool safety/diagnostic sensing
How it works
A voltage detector assembly senses or monitors voltage presence or level in an equipment subsystem.
Voltage detection can support safety interlocks, diagnostics, and monitoring of high-voltage systems such as ESC power.
Technical guide
ESC voltage detection
Voltage detection around an electrostatic chuck monitors high-voltage behavior or presence.
Monitoring ESC voltage helps verify clamping power and can support safety or fault detection.
Verify: Voltage range; Connector configuration; ESC compatibility; Calibration or threshold settings; Meaning of 2300
- ESC
- Electrostatic chuck
What to verify before purchase
- Voltage range
- Connector type
- ESC subsystem compatibility
- Calibration/threshold requirements
- Meaning of 2300
Confirm with the seller
- Exact voltage rating
- Specific Lam platform
- Sensor output type
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.