LAM RESEARCH 853-007526-001 GATE DRIVE CYLINDERLam Research  P/N: 853-007526-001 / AutoEtch Outer Gate Drive Cylinder / NEWLam 853-007526-001, Gate Drive Cylinder, Aspect Systems D-56414,Lam 853-007526-001, Gate Drive Cylinder, KURODA C-2-50-38, Refurbished853-007526-001 / GATE DRIVE CYLINDER, HUMPHREY CN534B / LAM LAM RESEARCH 853-007526-001 GATE DRIVE CYLINDERLAM RESEARCH 853-007526-001 GATE DRIVE CYLINDERLAM RESEARCH 853-007526-001 GATE DRIVE CYLINDER, HUMPHREY CN534BLam 853-007526-001, Gate Drive Cylinder, Humphrey CN534N, Tested, WorkingLam Research  P/N: 853-007526-001 / ASSY, OUTER GATE DRIVE CYLINDER / (NEW)Lam Research 853-009000-004 853-008100-002-D 853-007526-001 Semiconductor NEW Lam Research PN: 853-007526-001 Cylinder, Door Outer Humphrey CN534B
Image 1 of 12

LAM RESEARCH 853-007526-001

Outer Gate Drive Cylinder Assembly

Market Availability & Pricing

Part number853-007526-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales112.5 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Gate & Slit Valve Components
Outer Gate Drive Cylinder Assembly
LAM RESEARCH853-007526-001Gate drive cylinder assembly
Product description
Lam Research 853-007526-001 outer gate drive cylinder / gate drive cylinder assembly for AutoEtch or related Lam gate mechanism use.
Specifications and identifiers
identification
DescriptionOuter gate drive cylinder / gate drive cylinder
Reported supplier variantsHumphrey CN534B/CN534N, Kuroda C-2-50-38, and Aspect D-56414 appear in evidence
Use contextAutoEtch/gate drive cylinder context appears in evidence
Equipment context
  • Lam AutoEtch or related gate-drive subsystem
Applications
load-lock and chamber isolationroughing and foreline controlvacuum gate/slit door actuationGate or door actuationAutoEtch outer gate cylinder replacementPneumatic chamber mechanism service
How it works

A valve or actuator assembly used to isolate, open, close, or meter flow in a vacuum or process-gas path.

Valve geometry, actuator type, port standard, seal material, and leak integrity must match the tool position and process environment.

Technical guide
stainless steel

common vacuum-compatible metal for valve bodies and fittings

pneumatic actuation

uses compressed air to move a valve or cylinder

What to verify before purchase
  • Verify exact cylinder supplier/model and stroke
  • Confirm porting, mounting, and sensor/limit switch arrangement
  • Check seals and pneumatic leakage
Confirm with the seller
  • Exact supplier variant for this part number is not resolved

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM RESEARCH 853-007526-001 GATE DRIVE CYLINDER

LAM RESEARCH 853-007526-001 GATE DRIVE CYLINDER

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Dec 6, 2024 07:02 UTC
End recorded: Dec 7, 2024 07:12 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research  P/N: 853-007526-001 / AutoEtch Outer Gate Drive Cylinder / NEW

Lam Research P/N: 853-007526-001 / AutoEtch Outer Gate Drive Cylinder / NEW

USD 995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Nov 18, 2023 04:09 UTC
End recorded: Dec 6, 2024 19:54 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.