853-009300-001 / GAP DRIVE CONTROL ASSEMBLY / LAM RESEARCHLAM Research 853-009300-001 gap driver module                            9 21 4rLAM Research 810-009281-001 853-009300-001 Gap Drive Control Board AssemblyLAM RESEARCH 853-009300-001 REV D BD9810-002 GAP DRIVE ASSY853-009300-001 / GAP DRIVE CONTROL ASSEMBLY / LAM RESEARCH853-009300-001 / GAP DRIVE CONTROL ASSEMBLY / LAM RESEARCH853-009300-001 / GAP DRIVE CONTROL ASSEMBLY / LAM RESEARCH853-009300-001 /CONTROL ASSEMBLY, GAP DRIVE/ LAM RESEARCHLam Research  P/N: 853-009300-001 / AutoEtch Gap Drive Controller / Refurbish Lam Research AUTOETCH  P/N: 853-009300-001 Gap Drive Controller / 810-9781-001Lam Research AUTOETCH  P/N: 853-009300-001 Gap Drive Controller LAM RESEARCH 853-009300-001 REV.D GAP DRIVE ASSY853-009300-001 /CONTROL ASSEMBLY, GAP DRIVE/ LAM RESEARCHLam Research  P/N: 853-009300-001 / ASSY, GAP DRIVE CONTROLLER / REFURBISHEDLAM RESEARCH 853-009300-001 REV D BD9810-002 GAP DRIVE ASSYLam Research 490 Gap Driver Controller, 853-009300-001Lam Research 490 Gap Driver Controller, 853-009300-001
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LAM RESEARCH 853-009300-001

Gap drive controller assembly

Market Availability & Pricing

Part number853-009300-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales785 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Control › Motion & Robotics › Motion Controllers
Gap drive controller assembly
LAM RESEARCH853-009300-001Gap drive controller
Product description
AutoEtch gap drive controller / control assembly
Specifications and identifiers
supported details
Assembly typeGap drive controller / gap drive control assembly
Controller used for a gap-drive mechanism.
Platform termAutoEtch
Appears in multiple source titles.
Board reference810-009281-001 / BD9810-002
Associated board/control assembly numbers seen in the evidence.
Equipment context
  • Lam Research AutoEtch
Applications
Lam AutoEtch gap controlMotion control module replacementChamber mechanism serviceControl of a gap-drive mechanismService replacement for AutoEtch gap drive control assemblies
How it works

A controller assembly that drives or manages a mechanical gap-adjustment mechanism.

Accurate gap control can be critical for repeatable chamber geometry or RF/process spacing.

Technical guide
gap_drive

A drive mechanism used to set a controlled spacing or position.

What to verify before purchase
  • Confirm board revision and matching companion board number.
  • Verify whether the unit is a controller module, board assembly, or refurbished complete assembly.
Confirm with the seller
  • Exact AutoEtch model revision compatibility

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

853-009300-001 / GAP DRIVE CONTROL ASSEMBLY / LAM RESEARCH

853-009300-001 / GAP DRIVE CONTROL ASSEMBLY / LAM RESEARCH

USD 1126.6500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 13, 2026 21:26 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research 853-009300-001 gap driver module                            9 21 4r

LAM Research 853-009300-001 gap driver module 9 21 4r

USD 800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 23, 2024 03:32 UTC
End recorded: Dec 6, 2024 21:25 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM Research 810-009281-001 853-009300-001 Gap Drive Control Board Assembly

LAM Research 810-009281-001 853-009300-001 Gap Drive Control Board Assembly

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 24, 2024 00:01 UTC
End recorded: Dec 6, 2024 17:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH 853-009300-001 REV D BD9810-002 GAP DRIVE ASSY

LAM RESEARCH 853-009300-001 REV D BD9810-002 GAP DRIVE ASSY

USD 3000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 16, 2017 19:40 UTC
End recorded: Dec 7, 2024 02:46 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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